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Photoresist-based integration of enzyme functionality into MEMS

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Abstract

We demonstrate the direct immobilization of glucose oxidase and lactate oxidase onto photoresists commonly used in microfabrication. The method allows for a cost-effective, facile inclusion of enzyme functionality into novel MEMS devices because it does not require any chemical or physical pre-treatment of surfaces, and it is largely compatible with existing fabrication technologies. We used fluorescence imaging and absorbance spectrometry to confirm attachment of the enzymes onto the photoresists and to determine their activity. In addition, the procedure was used to successfully integrate enzyme functionality into a photoresist-based biosensor. This further demonstrates the effectiveness of the approach, and opens a path towards other novel applications in MEMS research.

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Acknowledgments

The authors would like to thank S. McQuaide for contribution of the schematic in Fig. 3, and A. Lingley for helpful discussions about the sensor setup. In addition, the authors would like to thank A. Shum and M. Cowan for the preliminary sensor design. Furthermore, we thank the National Science Foundation for the financial support of this work.

Conflict of interest

The authors declare that they have no conflict of interest.

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Authors and Affiliations

  1. Department of Electrical Engineering, University of Washington, 185 Stevens Way, Seattle, WA, 98125, USA

    Nicole Thomas, Ilkka Lähdesmäki & Babak A. Parviz

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  1. Nicole Thomas
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  2. Ilkka Lähdesmäki
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  3. Babak A. Parviz
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Correspondence to Nicole Thomas.

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Thomas, N., Lähdesmäki, I. & Parviz, B.A. Photoresist-based integration of enzyme functionality into MEMS. Microsyst Technol 17, 1505–1510 (2011). https://doi.org/10.1007/s00542-011-1333-8

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  • DOI: https://doi.org/10.1007/s00542-011-1333-8

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