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Review of MEMS flow sensors based on artificial hair cell sensor

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Abstract

An artificial hair cell sensor is the current technology based on a biological inspiration and is widely used in underwater applications including the glider, robotic and autonomous surface vehicle. These papers discuss a few strategies in relation to the principles of sensing, fabrication, performance, and preliminary measurement data. The MEMS flow sensor is generally needed to replace existing commercial sensors that are inadequate for some applications. Material also provides some advantages to the hair cell sensor. Some materials such as Polydimethylsilaxone and Polyurethane have been investigated. The sensing element is reviewed including the doped piezoresistors, strain gauge and force sensitive resistors. Performance and result of each design will be presented briefly. Finally, the importance and the need for modeling, simulation and experiments will be reviewed based on the latest achievements on that particular research area.

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Acknowledgments

The author is a USM fellowship holder. This study was supported by short term grant number 304/PELECT/60310023 and grant number 304/PELECT/6050124.

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Authors and Affiliations

  1. Underwater Robotics Research Group (URRG), School of Electrical and Electronic Engineering, Universiti Sains Malaysia, Engineering Campus, 14300, Pulau Pinang, Nibong Tebal, Malaysia

    Mohd Norzaidi Mat Nawi, Asrulnizam Abd Manaf & Mohd Rizal Arshad

  2. Collaborative Microelectronic Design Excellence Centre (CEDEC), Engineering Campus, Universiti Sains Malaysia, 14300, Pulau Pinang, Nibong Tebal, Malaysia

    Othman Sidek

Authors
  1. Mohd Norzaidi Mat Nawi
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  2. Asrulnizam Abd Manaf
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  3. Mohd Rizal Arshad
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  4. Othman Sidek
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Correspondence to Asrulnizam Abd Manaf.

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Mat Nawi, M.N., Manaf, A.A., Arshad, M.R. et al. Review of MEMS flow sensors based on artificial hair cell sensor. Microsyst Technol 17, 1417–1426 (2011). https://doi.org/10.1007/s00542-011-1330-y

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  • DOI: https://doi.org/10.1007/s00542-011-1330-y

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