Abstract
This paper presents a micro electromagnetic energy harvester which can convert low level vibration energy to electrical power. It mainly consists of an electroplated copper planar spring, a permanent magnet and a copper planar coil with high aspect ratio. Mechanical simulation shows that the natural frequency of the magnet-spring system is 94.5 Hz. The resonant vibration amplitude of the magnet is 259.1 μm when the input vibration amplitude is 14 μm and the magnet-spring system is at resonance. Electromagnetic simulation shows that the linewidth and the turns of the coil influence the induced voltage greatly. The optimized electromagnetic vibration energy harvester can generate 0.7 μW of maximal output power with peak–peak voltage of 42.6 mV in an input vibration frequency of 94.5 Hz and input acceleration of 4.94 m/s2 (this vibration is a kind of low level ambient vibration). A prototype (not optimized) has been fabricated using MEMS micromachining technology. The testing results show that the prototype can generate induced voltage (peak–peak) of 18 mV and output power of 0.61 μW for 14.9 m/s2 external acceleration at its resonant frequency of 55 Hz (this vibration is not in a low ambient vibration level).
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Acknowledgement
This work is supported by China Scholarship Council, National High Technology Research and Development Program of China (No. 2006AA04Z360), International Corporation Program of Ministry of Science and Technology of China (No. 2008GR0982), and Program of Science and Technology Commission of Shanghai Municipality, China (No. 08230705500). The experiment of micro coil fabricated using SU-8 photoresist was done in Micro System Center, Ritsumeikan University, Japan.
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Wang, P., Tanaka, K., Sugiyama, S. et al. A micro electromagnetic low level vibration energy harvester based on MEMS technology. Microsyst Technol 15, 941–951 (2009). https://doi.org/10.1007/s00542-009-0827-0
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DOI: https://doi.org/10.1007/s00542-009-0827-0