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Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators

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Abstract

In this work, the design, fabrication and characterization of an electromagnetic inertial microgenerator compatible with Si micro-systems technology is presented. The device includes a fixed micromachined coil and a movable magnet mounted on a resonant polymeric structure. The characterization of the fabricated prototypes has allowed to observe the presence of non-linear effects that lead to the appearance of hysteretic vibrational phenomenon and strongly affect the output of the microgenerator. These effects are likely related to the mechanical characteristics of the polymeric membrane, and determine an additional dependence of vibration frequency on the excitation amplitude. Under such non-linear conditions, power densities up to 40 μW/cm3 are obtained for devices working with low level excitation conditions similar to those present in domestic and office environment.

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Acknowledgments

EME is a member of CEMIC (Center of Microsystems Engineering) of the “Generalitat de Catalunya”. The funding of this work by the IST program of the European Commission under the SENSATION project (ref. FP6-507231) is acknowledged by the authors from the University of Barcelona. This work was also supported by grant SAB-2006-165 to E. Martincic from the Spanish “Ministerio de Educación y Ciencia”. The clean room processes described in this work were also supported by a grant to N. Fondevilla within the GICSERV-2007 program, from the Spanish “Ministerio de Educación y Ciencia”.

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Authors and Affiliations

  1. Department of Electrònica, EME/CEMIC/CERMAE, University of Barcelona, 08028, Barcelona, Spain

    C. Serre, A. Pérez-Rodríguez, N. Fondevilla & J. R. Morante

  2. Centre Nacional de Microelectrònica IMB-CSIC, 08193, Bellaterra, Spain

    J. Montserrat & J. Esteve

  3. IEF, Université Paris-Sud-XI, 91405, Orsay, France

    E. Martincic

Authors
  1. C. Serre
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  2. A. Pérez-Rodríguez
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  3. N. Fondevilla
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  4. E. Martincic
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  5. J. R. Morante
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  6. J. Montserrat
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  7. J. Esteve
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Correspondence to C. Serre.

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Serre, C., Pérez-Rodríguez, A., Fondevilla, N. et al. Linear and non-linear behavior of mechanical resonators for optimized inertial electromagnetic microgenerators. Microsyst Technol 15, 1217–1223 (2009). https://doi.org/10.1007/s00542-009-0825-2

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  • DOI: https://doi.org/10.1007/s00542-009-0825-2

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