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Resonant operation and cycle work from a MEMS-based micro-heat engine

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Abstract

The documentation of a new engine thermodynamic cycle on the micro-scale is presented. This new cycle is the result of resonant operation and cycle work production from a MEMS-based micro-heat engine. The engine is constructed of two thin membranes surrounding a cavity filled with working fluid. This new thermodynamic cycle is shown to include nearly constant volume pressure increase, expansion, heat rejection, and compression components. A thermal switch is integrated with the micro-engine to control heat rejection. The micro-engine is shown to produce up to 6.7 μW of cyclic mechanical power when operated on this cycle. Micro-engine natural frequency is shown to vary from 90 to 140 Hz. The Micro-engine is shown to operate across a low temperature gradient of 1.5°C.

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Authors and Affiliations

  1. Louisiana Tech University, Institute for Micromanufacturing, 911 Hergot Ave, Ruston, LA, 71272, USA

    L. W. Weiss

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  1. L. W. Weiss
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Correspondence to L. W. Weiss.

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Weiss, L.W. Resonant operation and cycle work from a MEMS-based micro-heat engine. Microsyst Technol 15, 485–492 (2009). https://doi.org/10.1007/s00542-008-0716-y

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  • DOI: https://doi.org/10.1007/s00542-008-0716-y

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