Skip to main content
SpringerLink
Log in

Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

A microfabrication process allowing rapid replication of high aspect ratio powder composite microstructures is developed using silicone rubber casting. Potential applications include the elimination lead in medical imaging instruments, such as anti-scatter grids for X-ray imaging and collimators for nuclear imaging. In this paper, we demonstrated the high precision fabrication of grids and collimators using high density tungsten powder composite of about 9–9.5 g/cm3 or greater. Aspect ratio of 15:1 was demonstrated for a single piece and larger aspect ratio was achieved by precision stacking of many layers. The demonstrated replication process provides low cost, mass production of high-aspect-ratio microstructures.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  • Bauer W, Knitter R (2002) Development of a rapid prototyping process chain for the production of ceramic microcomponents. J Mater Sci 37:3127–3140

    Article  Google Scholar 

  • Madou MJ (2002) Fundamentals of microfabrication: the science of miniaturization, CRC Press, Boca Raton

  • Makarova OV, Mancini DC, Moldovan N, Divan R, Tang C-M, Ryding DG, Lee RH (2003) Microfabrication of freestanding metal structures using graphite substrate. Sens Actuators A 103:182–186

    Article  Google Scholar 

  • Makarova OV, Mancini DC, Moldovan N, Divan R, Zyryanov VN, Tang C-M (2004) Fabrication of focused two-dimensional grids. Microsyst Technol 10:540–543

    Article  Google Scholar 

  • Yan Y, Chan-Park MB, Gao J, Yue CY (2004) Electroless nickelplated UV-embossed microstructured surface with very high aspect ratio channels. Langmuir 20:1031–1035

    Article  Google Scholar 

  • Zhang D, Su B, Button TW (2004) Preparation of concentrated aqueous alumina suspensions for softmolding microfabrication. J Euro Cera Soc 24:231–237

    Article  MATH  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Creatv MicroTech, Inc, Chicago, IL, 60612, USA

    Guohua Yang & Olga V. Makarova

  2. Creatv MicroTech, Inc, Potomac, MD, 20854, USA

    Platte Amstutz & Cha-Mei Tang

Authors
  1. Guohua Yang
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Olga V. Makarova
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Platte Amstutz
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Cha-Mei Tang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Guohua Yang.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yang, G., Makarova, O.V., Amstutz, P. et al. Rapid replication of powder composite high-aspect-ratio microstructures using silicone rubber micromolds. Microsyst Technol 14, 1663–1667 (2008). https://doi.org/10.1007/s00542-008-0575-6

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-008-0575-6

Keywords

Search

Navigation