Abstract
This work describes the design, simulation, fabrication and characterization of a TiN/Pt microheater prepared on a GaAs micromechanical structure as a prospective device for micro-electro-mechanical system (MEMS) sensor arrays. Electro-thermal simulation was employed to verify the properties of the designed microstructure, which confirmed achievement of the operating temperatures in the range from 470 to 600 K with a heating power less than 25 mW. The average temperature gradient in the active area does not exceed 0.6 K/μm. Fabrication of GaAs suspended membranes was demonstrated, realized in two steps by combination of surface and bulk micromachining. Development and characterization of a microheater on a GaAs membrane is described. The mechanical stability of the heated multilayer membrane structure was tested and satisfactory mechanical stability of the hotplate was confirmed. The power consumption at an operating temperature of approximately 550 K is about 30 mW which is in good agreement with the value of about 22 mW obtained from electro-thermal simulation. The achieved thermal resistance value is 8.43 K/mW.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Aslam M, Gregory C, Hattfield JV (2004) Polyimide membrane for micro-heated gas sensor array. Sens Actuators B 103:153–157
Barconcini M, Placidi P, Cardinali GC, Scorzoni A (2004) Thermal characterization of a microheater for micromachined gas sensors. Sens Actuators A 115:8–14
Cerda Belmonte J, Puigcorbe J, Arbiol J, Vila A, Morante JR, Sabate N, Gracia I, Cane C (2006) High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications. Sens Actuators B 114:826–835
Chiang YM, Lau J, Bachman M, Li GP, Kim HK, Ra Y, Ketola K (2002) Mat. Res. Soc. Symp. Proc. vol. 729, Materials Research Society: U3.1.1–U3.1.6
De Salvo GJ, Swanson JA (1979) ANSYS user’s manual. Swanson analysis systems Inc., Houston
Hartnagel HL, Mutamba K, Pfeiffer J, Riementschneider R, Peerlings J (1999) 57th annual device research conference digest, Santa Barbara, 112–115
Hascik S, Lalinsky T, Mozolova Z, Kuzmik J (1998) Patterning of cantilevers for power sensor microsystem. Vacuum 51:307–309
Hjort K, Strcubel K, Viktorovich P (1996) Indium phosphide based micro optoelectro mechanics. IEEE/LEOS summer topicals, Keystone, CO, 7–9 Aug 1996
Hotovy I, Rehacek V, Lalinsky T, Hascik S, Kudela P (2006) Gallium arsenide suspended microheater for MEMS gas sensors, 20th European conference on solid-state transducers (Eurosensors XX), Goeteborg, 328–329
Pantazis A, Neculoiu D, Hatzopoulos Z, Vasilache D, Lagadas M, Dragoman M, Buiculescu C, Petrini M, Muller AA, Konstantinidis G, Muller A (2005) Millimeter-wave passive circuit elements based on GaAs micromachining. J Micromech Microeng 15:853–859
Shul RJ, Lovejoy ML, Word JC, Howard AJ, Rieger DJ, Krawitz SH (1997) High rate reactive ion etch and electron cyclotron resonance etching of GaAs via holes using thick polyimide and photoresist masks. J Vac Sci Technol B 15:657–664
Suzuki T, Kunihara K, Kobayashi M, Tabata S, Higaki K, Ohnishi H (2005) A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and thin film heater. Sens Actuators B 109:185–189
Acknowledgments
This work was supported by the Scientific Grant Agency of the Ministry of Education of the Slovak Republic and of the Slovak Academy of Sciences, No. 1/3095/06, by Science and Technology Assistance Agency under contract No. APVT-20-021004.
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Hotovy, I., Rehacek, V., Mika, F. et al. Gallium arsenide suspended microheater for MEMS sensor arrays. Microsyst Technol 14, 629–635 (2008). https://doi.org/10.1007/s00542-007-0470-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s00542-007-0470-6