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Development and application of a diaphragm micro-pump with piezoelectric device

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Abstract

In this study, a new type of thin, compact, and light weighed diaphragm micro-pump has been successfully developed to actuate liquid by the vibration of a diaphragm. The micro-diaphragm pump with two valves is fabricated in an aluminum case by using highly accurate CNC machine, and the cross-section dimension is 28 mm × 5 mm. Both valves and diaphragm are manufactured from PDMS. The amplitude of vibration by a piezoelectric device produces an oscillating flow and alters the chamber volume by the curvature change of a diaphragm. Several experimental set-ups for performance tests in a single micro-diaphragm pump, isothermal flow open system, and a closed liquid cooling system are designed and implemented. The performance of a one-side actuating micro-diaphragm pump is affected by the design of check valves, diaphragm, piezoelectric device, chamber volume, input voltage and frequency. The measured maximum flow rate of present design is 72 ml/min at zero total pump head in the range of operation frequency 70–180 Hz.

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Abbreviations

c :

Damping coefficient

E :

Module of elasticity

f :

Frequency

F :

External force

g :

Acceleration of gravity

H L :

Head loss

I :

Second moment of area of a rectangular section

k :

Stiffness constant

L :

Length of the valve

M :

Bending moment

m :

Mass

P :

Pressure

t :

Time

ν :

Velocity

ζ :

Damping factor

ρ :

Density

ω n :

Natural frequency

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Authors and Affiliations

  1. Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan

    H. K. Ma, B. R. Hou, H. Y. Wu, C. Y. Lin & J. J. Gao

  2. Cooler Master Co., Taipei, Taiwan

    M. C. Kou

Authors
  1. H. K. Ma
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  2. B. R. Hou
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  3. H. Y. Wu
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  4. C. Y. Lin
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  5. J. J. Gao
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  6. M. C. Kou
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Correspondence to H. K. Ma.

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Ma, H.K., Hou, B.R., Wu, H.Y. et al. Development and application of a diaphragm micro-pump with piezoelectric device. Microsyst Technol 14, 1001–1007 (2008). https://doi.org/10.1007/s00542-007-0462-6

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  • DOI: https://doi.org/10.1007/s00542-007-0462-6

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