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Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

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Abstract

This study models and optimizes the electromagnetic actuator in an MEMS-based valveless impedance pump. The actuator comprises an electroplated permanent magnet mounted on a flexible PDMS diaphragm and electroplated Cu coils located on a glass substrate. In optimizing the design of the actuator, the objective is to maximize the output flow rate of the micropump while maintaining the mechanical integrity of its constituent parts. The study commences by developing optimized theoretical models for each of the components within the actuator, namely the diaphragm, the magnet, and the micro-coils. The theoretical models are then verified numerically using FEA software. The magnitude of the magnetic force acting on the flexible diaphragm is calculated using Ansoft/Maxwell3D FEA software. The simulation results obtained by ANSYS FEA software for the diaphragm deflection are found to be in good agreement with the theoretical predictions. In general, the results show that the desired diaphragm deflection of 15 μm can be obtained by passing a current of 0.6–0.7 A through the micro-coil to produce a compression force of 11 μN. The valveless micro impedance pump proposed in this study is easily fabricated and is readily integrated with existing biomedical chips due to its plane structure. The results of this study provide a valuable contribution to the ongoing development of Lab-on-a Chip systems.

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Abbreviations

a :

Radius of the diaphragm (μm)

B r :

The remanent magnetic induction field of the permanent magnet (T)

c :

Radius of the magnet (μm)

D :

Flexural rigidity of the diaphragm (KPa μm3)

E :

Elastic modulus of the diaphragm (KPa)

F :

total load acting on the diaphragm (μN)

FEA:

Finite element analysis

F lmt :

Elastic limit force of the diaphragm (μN)

F z :

Electromagnetic force between magnet and micro-coils in the vertical direction (μN)

h :

Thickness of the diaphragm (μm)

H z :

The vertical magnetic field generated by the microcoil (A/m)

κ:

The ratio of radius for the diaphragm (a) to the magnet (c)

MEMS:

Micro-electro-mechanical systems

PDMS:

Polydimethylsilxane

PZT:

Lead zirconate titanate

q :

The uniform load acting over a circular area located in the center of the diaphragm (μN/μm2)

S m :

Surface area of the magnet (μm2)

V m :

Volume of the magnet (μm3)

w max :

Maximum deflection of the diaphragm (μm)

ν:

Poisson’s ratio of the diaphragm

σ y :

Yield strength of the diaphragm (KPa)

∂H z /∂z :

the gradient of vertical magnetic field (A/m2)

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Acknowledgments

The current authors gratefully acknowledge the financial support provided to this study by the National Science Council of Taiwan (NSC-94-2211-E-212-009 & NSC-94-2218-E-006-045). Furthermore, the authors wish to express their gratitude to the National Center for High-Performance Computing (NCHC) for the access provided to the Ansoft/Maxwell3D software.

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Authors and Affiliations

  1. Department of Mechanical and Automation Engineering, Da-Yeh University, 515, Changhua, Taiwan

    Hsien-Tsung Chang & Chia-Yen Lee

  2. Department of Aeronautics and Astronautics, National Cheng-Kung University, 701, Tainan, Taiwan

    Chih-Yung Wen

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  1. Hsien-Tsung Chang
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  2. Chia-Yen Lee
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  3. Chih-Yung Wen
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Correspondence to Chia-Yen Lee.

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Chang, HT., Lee, CY. & Wen, CY. Design and modeling of electromagnetic actuator in mems-based valveless impedance pump. Microsyst Technol 13, 1615–1622 (2007). https://doi.org/10.1007/s00542-006-0332-7

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  • DOI: https://doi.org/10.1007/s00542-006-0332-7

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