Abstract
In this paper, the influence of the van der Waals force on two main parameters describing an instability point of cantilever type nanomechanical switches, which are the pull-in voltage and deflection are investigated by using a distributed parameter model. The fringing field effect is also taken into account. The nonlinear differential equation of the model is transformed into the integral form by using the Green’s function of the cantilever beam. The integral equation is solved analytically by assuming an appropriate shape function for the beam deflection. The detachment length and the minimum initial gap of the cantilever type switches are given, which are the basic design parameters for NEMS switches. The pull-in parameters of micromechanical electrostatic actuators are also investigated as a special case of our study by neglecting the van der Waals force.
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Bernstein D, Guidotti P, Pelesko JA (2000) Mathematical analysis of an electrostatically actuated MEMS device. In: Proceedings of modeling and simulation of microsystems (MSM). San Diego pp 489–492
Bochobza-Degani O, Nemirovsky Y (2002) Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model. Sens Actuators A 97–98:569–578
Buks E, Roukes ML (2001) Stiction, adhesion energy, and the Casimir effect in micromechanical systems. Phys Rev B 63:033402
Cheng J, Zhe J, Wu X (2004) Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators. J Micromech Microeng 14:57–68
Chowdhury S, Ahmadi M, Miller WC (2005) A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams. J Micromech Microeng 15:756–763
Coventor Inc. Pull-in voltage analysis of electrostatically-actuated beams verifying accuracy of Coventor behavioral models. Available online at http://www.coventor.com
Dequesnes M, Rotkin SV, Aluru NR (2002) Calculation of pull-in voltages for carbon nanotube-based nanoelectromechanical switches. Nanotechnology 13:120–131
Gupta RK (1997) Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems. PhD thesis, MIT, Cambridge
Huang JM, Liew KM, Wong CH, Rajendran S, Tan MJ, Liu AQ (2001) Mechanical design and optimization of capacitive micromachined switch. Sens Actuators A 93:273–285
Israelachvili JN (1992) Intermolecular and surface forces. Academic, London
Kim P, Lieber CM (1999) Nanotube nanotweezers. Science 286:2148–2150
Lin WH, Zhao YP (2003) Dynamic behavior of nanoscale electrostatic actuators. Chin Phys Lett 20:2070–2073
Osterberg PM (1995) Electrostatically actuated micromechanical test structures for material property measurement. PhD dissertation, MIT, Cambridge
Osterberg PM, Senturia SD (1997) M-TEST: a test chip for MEMS material property measurement using electrostatically actuated test structures. J Microelectromech Syst 6(2):107–118
Pamidighantam S, Puers R, Baert K, Tilmans HAC (2002) Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions. J Micromech Microeng 12:458–464
Pelesko JA (2001) Multiple solutions in electrostatic MEMS. In: Proceedings of modeling and simulation of microsystems (MSM), Hilton Head, pp 290–293
Pelesko JA, Bernstein DH (2003) Modeling MEMS and NEMS. Chapman & Hall/CRC, Boca Raton
Petersen KE (1978) Dynamic micromechanics on silicon: techniques and devices. IEEE Trans Electron Devices ED-25(10):1241–1250
Rotkin SV (2002) Analytical calculations for nanoscale electromechanical systems. Electrochem Soc Proc 6:90–97
van Spengen WM, Puers R, De Wolf I (2002) A physical model to predict stiction in MEMS. J Micromech Microeng 12:702–713
Timoshenko S (1987) Theory of plates and shells. McGraw Hill, New York
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Appendix
Appendix
Solutions of the integrals used in Eq. 29 are
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Ramezani, A., Alasty, A. & Akbari, J. Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators. Microsyst Technol 12, 1153–1161 (2006). https://doi.org/10.1007/s00542-006-0244-6
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DOI: https://doi.org/10.1007/s00542-006-0244-6