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Fabrication and characterizations of a monolithic PZT microstage

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Abstract

This paper reports on the fabrication and characterizations of a monolithic Pb(ZrTi)O3 (PZT) microstage with multi-degrees of freedom for high-precision positioning. The entire device is fabricated in a symmetrical arrangement from a PZT plate with a size of 15 × 15 × 0.8 mm3. Four actuation units with displacement amplification mechanisms are integrated in the structure. All the actuators can be driven individually which result in movements of a stage in different directions. The main fabrication steps include dicing, electroplating, lithography and laser machining. The performances of the displacement and the resonant frequencies of the microstage are simulated using a finite element method (FEM) with different dimensions. A prototype has been fabricated and evaluated. Comparisons between FEM simulation and experimental results are carried out.

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Acknowledgements

This work is supported in part by Future Medical Engineering based on the Bio-nanotechnology 21st Century COE Program, Tohoku University, and also supported in part by a Grant-in Aid for Scientific Research from the Japanese Ministry of Education, Culture, Sports, Science and Technology of Japan. A part of this work is performed at the Venture Business Laboratory, Tohoku University.

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Authors and Affiliations

  1. Graduate School of Engineering, Tohoku University, 6-6-01 Aramaki-Aza-Aoba, Aoba-ku, Sendai, 980-8579, Japan

    Hegen Xu, Takahito Ono & Masayoshi Esashi

  2. Department of Mechanical Engineering and Automation, Beihang University, No.37 XueYuan Road, HaiDian District, Beijing, 100083, China

    De-Yuan Zhang

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  1. Hegen Xu
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  2. Takahito Ono
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  3. De-Yuan Zhang
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  4. Masayoshi Esashi
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Correspondence to Hegen Xu.

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Xu, H., Ono, T., Zhang, DY. et al. Fabrication and characterizations of a monolithic PZT microstage. Microsyst Technol 12, 883–890 (2006). https://doi.org/10.1007/s00542-006-0206-z

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  • DOI: https://doi.org/10.1007/s00542-006-0206-z

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