Abstract
From the technical and economic points of view, systems integration, and packaging represent a crucial step in the production of microsystems. Compared to purely silicon- or glass-based systems, the variety of materials and geometries available for purely polymer microfluidic systems is much larger, due to the outstanding material properties. Moreover, polymers may be shaped and joined by comparably simple methods. Examples are polymer microreplication as well as various bonding methods. With them, complete polymer microsystems can be integrated. In addition, a number of established, compatible processes are available for the integration of functional elements that may also be made of other materials.
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References
Büstgens B, Bacher W, Bier W, Ehnes R, Maas D, Ruprecht R, Schomburg WK, Keydel L (1994) Micromembrane pump manufactured by molding. In: H Borgmann (ed) Proceedings of actuator ’94, 4th international conference on new actuators, AXON technologie consult GmbH, Bremen, pp 86–90
Dittmann D, Ahrens R, Rummler Z, Schlote-Holubek K, Schomburg WK (2001) Low-cost flow transducer fabricated with the AMANDA Process. In: Proceedings of transducers ’01, 11th international conference on solid-state sensors and actuators, Munich, Germany, pp 1472–1475
Guber AE, Heckele M, Herrmann D, Muslija A, Schaller Th, Gerlach A, Knebel G (2002) In: Proceedings of 5th International conference on microreaction technology (IMRET5), Springer, Berlin Heidelberg New York, pp 532–541
Guber AE, Heckele M, Herrmann D, Muslija A, Saile V, Eichhorn L, Gietzelt Th, Hoffmann W, Hauser PC, Tanyanyiwa J, Gerlach A, Gottschlich N, Knebel G (2004) Microfluidic lab-on-a-chip systems based on polymers—fabrication and application. Chem Eng J 101:447–453
Heckele M, Anna F (2002) Hot embossing of microstructures with integrated conduction paths for the production of lab-on-chip systems. In: Proceedings symposium on design, test, integration and packaging of MEMS/MOEMS (DTIP), Cannes, SPIE 4755:670–674
Heckele M, Durand A (2001) Microstructured through-holes in plastic films by hot embossing. In: Proceedings of 2nd international conference of the European society for precision engineering and nanotechnology (euspen), Turin, pp 196–198
Heckele M, Schomburg WK (2004) Review on micro molding of thermoplastic polymers. J Micromech Microeng 14:R1–R14
Herrmann D, Guber AE, Heckele M, Henzi P, Muslija A, Truckenmüller R, Eichhorn L, Gietzelt Th, Schaller Th, Hoffmann W, Gerlach A, Gottschlich N, Knebel G (2003) Plastic capillary systems for biomedical research and diagnosis. In: Proceedings of 2nd VDE world microtechnologies congress (MICRO tec), Munich, Germany, pp 81–86
Rogge T, Rummler Z, Schomburg WK (2002/2004) Polymer microvalve with a Hydraulic Piezo Drive fabricated by the AMANDA process. Book of abstracts Eurosensors XVI, Prague, pp 109–110, Sens Actuators A 110:206–212
Rummler Z, Berndt M, Härtl HG, Hempel M, Peters R, Schomburg WK (2000) Micro Degasser for HPLC devices. International mechanical engineering congress and exposition (IMECE), Orlando
Van den Berg A, Olthuis W, Berveld P (eds) (2000) In: Proceedings of micro total analysis systems (μTAS), Kluwer, Dordrecht
Wicht H, Bouchaud J (2002) Commercial aspects of microsystems: the importance of packaging. In: H Reichl (ed) SMT hybrid packaging, Nürnberg, Germany 145
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Heckele, M., Guber, A.E. & Truckenmüller, R. Replication and bonding techniques for integrated microfluidic systems. Microsyst Technol 12, 1031–1035 (2006). https://doi.org/10.1007/s00542-006-0158-3
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DOI: https://doi.org/10.1007/s00542-006-0158-3