Abstract
This paper reports an innovative technique for rapid fabrication of polymeric microlens arrays based on UV roller embossing process. In this method, a thin flat mold is fabricated by electroforming of nickel against a microlens master. The thin Ni mold with microlens cavities is then wrapped onto cylinder to form the roller. During rolling operation, the roller pressing and dragging the UV-curable photopolymer layer on the glass substrate through the rolling zone, the microlens array is formed. At the same time, the microlens array is cured by the UV light radiation while traveling through the rolling zone. The technique can be developed to an effective roll-to-roll process at room temperature and with low pressure. In this study, a roller embossing facility with UV exposure capacity has been designed, constructed and tested. Under the proper processing conditions, the 100×100 arrays of polymeric microlens, with a diameter of 100 μm, a pitch of 200 μm and a sag height of 21 μm can be successfully fabricated.
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Acknowledgments
This work was partially supported by the National Science Council (series no NSC93-2218-E-002–020) of Taiwan. The experimental work is mainly carried out at the MEMS Laboratory in the Nano-Electro-Machanical-Systems Research Center at NTU. The financial and technique supports are gratefully acknowledged.
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Chang, C., Yang, S. & Sheh, J.L. A roller embossing process for rapid fabrication of microlens arrays on glass substrates. Microsyst Technol 12, 754–759 (2006). https://doi.org/10.1007/s00542-006-0103-5
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DOI: https://doi.org/10.1007/s00542-006-0103-5