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Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry

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Abstract

The pressure strength of microfluidics glass chips for high-pressure chemistry has been examined. Internal pressures up to 320 bar have been measured, although variations are substantial. Long annealing steps at high temperatures did not show any improvement, but smoothening the powder blasted channel walls by isotropic etching did. Although macro cracks are observed at the bond interface it is believed that the formation of micro cracks in the channel wall and stress concentrations due to sharp corners in the channel cross-section geometry strongly limits the maximum applicable pressures.

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Acknowledgements

NWO/Ministry of Economical Affairs and STW (project 5605) are gratefully acknowledged for their financial support.

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Authors and Affiliations

  1. BIOS-Lab-on-a-Chip group, MESA+ Research Institute, University of Twente, 7500, AE, Enschede, The Netherlands

    R. E. Oosterbroek, D. C. Hermes, M. Kakuta, J. G. E. Gardeniers & A. van den. Berg

  2. Supra Molecular Chemistry and Technology group, MESA+ Research Institute, University of Twente, 7500, AE, Enschede, The Netherlands

    F. Benito-Lopez, W. Verboom & D. N. Reinhoudt

Authors
  1. R. E. Oosterbroek
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  2. D. C. Hermes
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  3. M. Kakuta
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  4. F. Benito-Lopez
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  5. J. G. E. Gardeniers
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  6. W. Verboom
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  7. D. N. Reinhoudt
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  8. A. van den. Berg
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Corresponding author

Correspondence to J. G. E. Gardeniers.

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Oosterbroek, R.E., Hermes, D.C., Kakuta, M. et al. Fabrication and mechanical testing of glass chips for high-pressure synthetic or analytical chemistry. Microsyst Technol 12, 450–454 (2006). https://doi.org/10.1007/s00542-005-0043-5

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  • DOI: https://doi.org/10.1007/s00542-005-0043-5

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