Abstract
Micro molding is the key process of LIGA (UV-LIGA) technique for low-cost mass production. It is difficult to demold for high aspect ratio of the structure fabricated by LIGA technique due to adhesion and friction force between the side-walls of the molding inserts and the thermoplastic material (PMMA). In this paper, the life times of the molding inserts made of Nickel (the material usually used for LIGA) and Ni-Teflon (PTFE) compound material are studied. The experiment shows the lifetime of Ni-PTFE molding insert is longer than the one of Ni for across pattern.
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This work was supported by the national High technology Research and Development Program of China (863 Program, No. 2002 AA404130), and National Natural Science Fundation of China (No. 10375058)
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Tian, Y., Zhang, P., Liu, G. et al. The lifetime comparison of Ni and Ni-PTFE moulding inserts with high aspect-ratio structure. Microsyst Technol 11, 261–264 (2005). https://doi.org/10.1007/s00542-004-0404-5
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DOI: https://doi.org/10.1007/s00542-004-0404-5