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Polymer microfabrication technologies

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Abstract

 The need for low-cost microfabrication technologies in modern life-sciences is described. The article compares the replication technologies, hot embossing and micro-injection moulding and gives an overview over the technologies used for fabrication of the replication masters. The back-end processes transforming the replicated plastic part into a complete microsystem are described. Some manufacturing issues of mass production are discussed.

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Authors and Affiliations

  1. MILDENDO GmbH, Göschwitzer Str. 40, D-07745 Jena, Germany E-mail: oliver.roetting@jenoptik.com, , , , , , DE

    O. Rötting, W. Röpke & H. Becker

  2. Applikationszentrum Mikrotechnik Jena, Otto-Schott-Str. 13, D-07743 Jena, Germany, , , , , , DE

    C. Gärtner

Authors
  1. O. Rötting
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  2. W. Röpke
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  3. H. Becker
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  4. C. Gärtner
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Received: 22 June 2001/Accepted: 18 July 2001

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Rötting, O., Röpke, W., Becker, H. et al. Polymer microfabrication technologies. Microsystem Technologies 8, 32–36 (2002). https://doi.org/10.1007/s00542-002-0106-9

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  • DOI: https://doi.org/10.1007/s00542-002-0106-9

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