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Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications

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Abstract

This review introduces in detail the history of the discovery of the nonlinear optical crystal KBe2BO3F2 (KBBF), with a full description of its growth, space structure, optical properties, and capability to generate deep-ultraviolet (UV) harmonic generation. Several important applications developed recently using all-solid-state deep-UV light sources, such as super-high-resolution laser photoemission spectrograph and 193 nm photolithography, will be reviewed.

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Authors and Affiliations

  1. Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, P.O. Box 2711, Beijing, 100190, China

    C. T. Chen, G. L. Wang, X. Y. Wang & Z. Y. Xu

Authors
  1. C. T. Chen
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  2. G. L. Wang
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  3. X. Y. Wang
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  4. Z. Y. Xu
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Correspondence to C. T. Chen.

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Chen, C.T., Wang, G.L., Wang, X.Y. et al. Deep-UV nonlinear optical crystal KBe2BO3F2—discovery, growth, optical properties and applications. Appl. Phys. B 97, 9–25 (2009). https://doi.org/10.1007/s00340-009-3554-4

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  • DOI: https://doi.org/10.1007/s00340-009-3554-4

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