Abstract.
A PACIS (pulsed arc cluster-ion source) developed for high average cluster-ion currents is presented. The performance of the PACIS at different operational modes is described, and the suitability for cluster-deposition experiments is discussed in comparison with other cluster-ion sources. Maximum currents of mass-selected cluster ions of 3–6 nA of small Sin - (n=4–10) clusters and 0.3–0.5 nA of large Aln +/- (n=20–70) clusters are achieved. The mass-selected cluster ions are soft-landed on a substrate at residual kinetic energies lower than 1 eV/atom, and the samples are characterized by X-ray photoelectron spectroscopy and scanning tunneling microscopy. First results on the soft landing of “magic” Si4 - clusters on graphite are presented.
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Received: 30 May 2001 / Accepted: 14 June 2001 / Published online: 2 October 2001
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Klipp, B., Grass, M., Müller, J. et al. Deposition of mass-selected cluster ions using a pulsed arc cluster-ion source. Appl Phys A 73, 547–554 (2001). https://doi.org/10.1007/s003390100947
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DOI: https://doi.org/10.1007/s003390100947