Polymer-based multi-layer conductive electrode film for plastic LCD applications

Abstract.

Thin films of polymer-based multi-layer conductive electrode to be used as a substrate for a plastic liquid crystal display (LCD) have been prepared by a DC magnetron roll-to-roll sputtering method. The conductive layer is composed of three layers, ITO/Ag/ITO or ITO/APC/ITO, where APC is Ag-Pd-Cu alloy, on the polymer substrate (Arton®), which has been treated with hard-coat and gas-barrier layers. The properties of the conductive electrode for the plastic LCD were the following: (1) sheet resistance is 6 Ω/square; (2) transparency is 88% at 550 nm; (3) H₂O gas permeation through the plastics is 0.35 g/m² in 24 h; (4) durability against solvents is good for 5% NaOH solution, IPA, methanol, NMP, acetone, etc.; (5) the irreversible shrinkage and the compaction rate are both less than 3 ppm/h after annealing for 100 h at 150 °C.