Abstract.
A novel off-axis pulsed-laser deposition (PLD) system for ferroelectric oxide thin films has been developed. The substrates are mounted “upside-down” and are rotating. The maximum substrate size is 2 inches in diameter. The optical and structural properties of the grown BaTiO3 films are compared to the films produced by an on-axis PLD system. The stoichiometry and thickness were checked with Rutherford backscattering spectrometry (RBS). The crystalline quality and orientation were investigated with X-ray diffraction (XRD) and Rutherford backscattering spectrometry in channeling configuration (RBS/C). Using atomic force microscopy, the rms surface roughness was measured. The BaTiO3 films grown on MgO form a planar optical waveguide. The optical losses and the refractive indices of these waveguides were determined with a prism coupling setup.
Films grown on 10×10 mm2 MgO (100) substrates in on-axis geometry show optical waveguide losses less than 3 dB/cm.
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Received: 21 July 1999 / Accepted: 15 September 1999 / Published online: 22 December 1999
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Siegert, M., Zander, W., Lisoni, J. et al. Off-axis pulsed laser deposition system for epitaxial oxide growth on substrates up to 2 inches in diameter . Appl Phys A 69 (Suppl 1), S779–S781 (1999). https://doi.org/10.1007/s003390051528
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DOI: https://doi.org/10.1007/s003390051528