Abstract.
Diamond films were successfully synthesized on aluminum nitride(AlN) ceramic substrates by hot-filament chemical vapor deposition (HFCVD) method. The thermal conductivity of the diamond film/aluminum nitride ceramic (DF/AlN) composites was studied by photothermal deflection (PTD) technique. It has reached 2.04 W/cm K, 73% greater than that of AlN ceramic. Compared with the measurement of scanning electron microscopy (SEM) and Raman spectroscopy, the influence of diamond films on the thermal conductivity of the composites was pointed out. The adhesion and the stresses were also studied. The unusual stability and very good adhesion of the diamond film on AlN ceramic substrate obtained is attributed to the formation of aluminum carbide.
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Received: 24 March 1998 / Accepted: 8 March 1999 / Published online: 5 May 1999
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Liao, Y., Fang, R., Ye, Z. et al. Investigation of the thermal conductivity of diamond film on aluminum nitride ceramic . Appl Phys A 69, 101–103 (1999). https://doi.org/10.1007/s003390050979
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DOI: https://doi.org/10.1007/s003390050979