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Received: 15 May 1997/Accepted: 10 September 1997
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Ulyashin, A., Bumay, Y., Job, R. et al. Formation of deep p–n junctions in p-type Czochralski grown silicon by hydrogen plasma treatment . Appl Phys A 66, 399–402 (1998). https://doi.org/10.1007/s003390050684
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DOI: https://doi.org/10.1007/s003390050684