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Chromium-doped diamond-like carbon films deposited by dual-pulsed laser deposition

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Abstract

Diamond-like carbon (DLC) and Cr-doped diamond-like carbon layers were studied. DLC and Cr-DLC were deposited on silicon and titanium substrates (Ti-6Al-4V) by dual-pulsed laser ablation using two KrF excimer lasers and two targets (graphite and chromium). The composition was analyzed using wavelength-dependent X-ray spectroscopy. The Cr content increased from 2.2 to 17.9 at%. The topology and surface properties as roughness of layers were studied using scanning electron microscopy and atomic force microscopy. With the chromium concentration increased the roughness and the number of droplets. Carbon and chromium bonds were determined by Raman spectroscopy. With an increase in chromium content the I D/I G ratio increased. Mechanical properties of DLC films with various chromium content were evaluated. Hardness (reduced Young’s modulus) was determined by nanoindentation and reached of 51 GPa (309 GPa). Films adhesion was studied using scratch test and with concentration of chromium increased up to 20 N.

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Acknowledgments

We thank the Institutional research plan AV010100522, grant of the Czech Technical University in Prague SGS12/167/OHK4/2T/17 and SGS13/093/OHK4/1T/17, and the Ministry of Education, Youth and Sports of the Czech Republic for grants COST LD12069.

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Authors and Affiliations

  1. Faculty of Biomedical Engineering, Czech Technical University in Prague, nam. Sitna 3105, 272 01, Kladno, Czech Republic

    P. Písařík, M. Jelínek, T. Kocourek, M. Zezulová & J. Remsa

  2. Institute of Physics ASCR v.v.i., Na Slovance 2, 182 21, Prague 8, Czech Republic

    P. Písařík, M. Jelínek, T. Kocourek, M. Zezulová, J. Remsa & K. Jurek

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  1. P. Písařík
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  2. M. Jelínek
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  3. T. Kocourek
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  4. M. Zezulová
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Correspondence to P. Písařík.

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Písařík, P., Jelínek, M., Kocourek, T. et al. Chromium-doped diamond-like carbon films deposited by dual-pulsed laser deposition. Appl. Phys. A 117, 83–88 (2014). https://doi.org/10.1007/s00339-013-8206-1

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