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Fabrication of nanochannels via near-field electrospinning

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Abstract

A simple and low-cost method is suggested to fabricate nanochannels via Near-Field Electrospinning (NFES). In this process, orderly and patterned nanofibers direct-written by NFES are used as sacrificial templates. Well-defined nanochannels are available after the removal process of both sacrificial fibers and material coating over the fibers. The sacrificial fiber, controlled by NFES, dominates the channel geometry. The channel width ranges from 133 nm to 13.54 µm while the applied voltage increases from 1.2 kV to 2.5 kV. Complicated wave-shape and grid pattern channels are presented under a corresponding movement of substrate. This method integrates electrospinning with conventional MEMS fabrication technology and has a potential in micro/nano manufacturing.

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Acknowledgements

The authors gratefully acknowledge the support from the National Natural Science Foundation of China (No. 51035002, No. 51105320) and Fundamental Research Funds for the Central Universities (No. 2010121039).

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Authors and Affiliations

  1. Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, 361005, China

    Xiang Wang, Gaofeng Zheng, Wei Cheng, Bulei Xu, Yongfang Huang & Daoheng Sun

  2. Department of Aeronautics, Xiamen University, Xiamen, 361005, China

    Yongfang Huang

  3. School of Mechanical and Electric Engineering, Jingdezhen Ceramic Institute, Jingdezhen, 333403, China

    Lei Xu

Authors
  1. Xiang Wang
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  2. Gaofeng Zheng
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  3. Lei Xu
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  4. Wei Cheng
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  5. Bulei Xu
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  6. Yongfang Huang
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  7. Daoheng Sun
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Correspondence to Yongfang Huang or Daoheng Sun.

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Wang, X., Zheng, G., Xu, L. et al. Fabrication of nanochannels via near-field electrospinning. Appl. Phys. A 108, 825–828 (2012). https://doi.org/10.1007/s00339-012-6975-6

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  • DOI: https://doi.org/10.1007/s00339-012-6975-6

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