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Effect of interference pattern on femtosecond laser-induced ripple structure

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Abstract

Combined structures composed of a micron-sized periodic structure and a nano-sized quasi-periodic ripple structure were generated by a single process of multiple shots of an interfering femtosecond laser. The former structure was generated by an interference pattern and controlled by a number of beams. The latter structure was generated by a multiple shot method. As a result, multiple periodic structures were generated. The periodicity of the structures was analyzed by two-dimensional (2D) fast Fourier transform (FFT). The most probable period of ripple structure was downsized to 177 nm by restricting irradiated region by a TM wave interference pattern. The smallest period was 105 nm. The dispersion angle of a ripple decreased to about 50%. The period and direction of the ripples were for a first time controlled by using interference.

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Authors and Affiliations

  1. Institute of Laser Engineering, Osaka University, 2-6 Yamadaoka, Suita, 565-0871, Japan

    Yoshiki Nakata & Noriaki Miyanaga

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  1. Yoshiki Nakata
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  2. Noriaki Miyanaga
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Correspondence to Yoshiki Nakata.

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Nakata, Y., Miyanaga, N. Effect of interference pattern on femtosecond laser-induced ripple structure. Appl. Phys. A 98, 401–405 (2010). https://doi.org/10.1007/s00339-009-5396-7

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  • DOI: https://doi.org/10.1007/s00339-009-5396-7

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