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Fabrication of three-dimensional (3D) woodpile structure photonic crystal with layer by layer e-beam lithography

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Abstract

Photonic crystal based superprism offers a way to design new optical components for beam steering and DWDM (Dense Wavelength Division Multiplexing) application. Three-dimensional (3D) photonic crystals are especially attractive as they could offer more control of the light beam. A FCT (Face-Centered-Tetragonal) woodpile structure has been fabricated using layer by layer stacking techniques with E-Beam lithography. Special planarizations and processes have been introduced to ensure the survivability and good alignment of the fabricated nanostructures. Scanning electron microscopy results proved the structure uniformity. With the proper design, the structure exhibits superprism effects around 1550 nm, and such effects have been observed in the experiments.

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Authors and Affiliations

  1. Department of Electrical & Computer Engineering, The University of Texas at Austin, Austin, TX, 78731, USA

    Li Wang, Sasa Zhang, Jiaqi Chen & Ray T. Chen

  2. School of Information Science & Engineering, Shandong University, Ji’nan, Shandong, 250100, P.R. China

    Sasa Zhang & Qingpu Wang

  3. Electrical & Computer Engineering Department, Rutgers, The State University of New Jersey, New York, 08854-8058, USA

    Wei Jiang

Authors
  1. Li Wang
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  2. Sasa Zhang
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  3. Qingpu Wang
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  4. Jiaqi Chen
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  5. Wei Jiang
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  6. Ray T. Chen
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Correspondence to Sasa Zhang or Ray T. Chen.

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Wang, L., Zhang, S., Wang, Q. et al. Fabrication of three-dimensional (3D) woodpile structure photonic crystal with layer by layer e-beam lithography. Appl. Phys. A 95, 329–334 (2009). https://doi.org/10.1007/s00339-009-5076-7

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  • DOI: https://doi.org/10.1007/s00339-009-5076-7

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