Abstract
Stainless steel films were reactively magnetron sputtered in argon/methane gas flow onto oxidized silicon wafers using austenitic stainless-steel targets. The deposited films of about 200 nm thickness were characterized by conversion electron Mössbauer spectroscopy, magneto–optical Kerr-effect, X-ray diffraction, scanning electron microscopy, Rutherford backscattering spectrometry, atomic force microscopy, corrosion resistance tests, and Raman spectroscopy. These complementary methods were used for a detailed examination of the carburization effects in the sputtered stainless-steel films. The formation of an amorphous and soft ferromagnetic phase in a wide range of the processing parameters was found. Further, the influence of the substrate temperature and of post vacuum-annealing were examined to achieve a comprehensive understanding of the carburization process and phase formation.
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P. Schaaf’s former affiliation: II. Physikalisches Institut, Universität Göttingen, Friedrich-Hund-Platz 1, 37077 Göttingen, Germany.
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Cusenza, S., Schaaf, P. Amorphous stainless steel coatings prepared by reactive magnetron-sputtering from austenitic stainless steel targets. Appl. Phys. A 94, 139–154 (2009). https://doi.org/10.1007/s00339-008-4685-x
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DOI: https://doi.org/10.1007/s00339-008-4685-x