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Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution

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Abstract

Decreasing structure sizes in both conventional and quantum solid state devices require novel fabrication methods: we present a technology which allows to implant ions through a small hole in the tip of an atomic force microscope. This technique offers a maskless addressing of small structures using different projectiles at kinetic energies between 0.5 and 5.0 keV. Our method aims to implant single atomic ions, molecular ions or charged nanoparticles with nm resolution. We test the method by implanting N+ ions into diamond and generating nitrogen-vacancy color centers. The system is operated with a conventional ion gun. However, in future we will employ an ion trap as a deterministic source of cold single ions.

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Authors and Affiliations

  1. RUBION, Ruhr-Universität Bochum, 44780, Bochum, Germany

    J. Meijer, S. Pezzagna, T. Vogel, B. Burchard & H.H. Bukow

  2. Department of Micro- and Nanoelectronical Systems, Institute of Micro- and Nanoelectronics, Technical University of Ilmenau, PF 10 05 65, 98684, Ilmenau, Germany

    I.W. Rangelow & Y. Sarov

  3. Institut für Verbrennung und Gasdynamik, Universität Duisburg-Essen, 47057, Duisburg, Germany

    H. Wiggers & I. Plümel

  4. 3. Physikalisches Institut, University Stuttgart, Pfaffenwaldring 57, 70550, Stuttgart, Germany

    F. Jelezko & J. Wrachtrup

  5. Institut für Quanteninformationsverarbeitung, University Ulm, Albert-Einstein-Allee, 89069, Ulm, Germany

    F. Schmidt-Kaler, W. Schnitzler & K. Singer

Authors
  1. J. Meijer
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  2. S. Pezzagna
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  3. T. Vogel
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  4. B. Burchard
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  5. H.H. Bukow
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  6. I.W. Rangelow
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  7. Y. Sarov
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  8. H. Wiggers
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  9. I. Plümel
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  10. F. Jelezko
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  11. J. Wrachtrup
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  12. F. Schmidt-Kaler
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  13. W. Schnitzler
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  14. K. Singer
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Corresponding author

Correspondence to J. Meijer.

Additional information

PACS

03.67.-a; 29.25.Ni; 61.72.Ji; 81.16.Rf; 85.40.Ry

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Meijer, J., Pezzagna, S., Vogel, T. et al. Towards the implanting of ions and positioning of nanoparticles with nm spatial resolution. Appl. Phys. A 91, 567–571 (2008). https://doi.org/10.1007/s00339-008-4515-1

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  • DOI: https://doi.org/10.1007/s00339-008-4515-1

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