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Fabrication of 3D metal/polymer microstructures by site-selective metal coating

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Abstract

Three-dimensional silver/polymer conjugated microstructures were fabricated by site-selective metal deposition on photopolymer structures in the sub-micrometer scale. Photopolymerizable resins with and without an amide group were independently prepared, and a three-dimensional polymer structure was fabricated with those resins by means of the two-photon-induced photopolymerization technique to confine the photopolymerization to a sub-micrometer volume. Silver was selectively deposited on the surface of the amide-containing polymer parts by electroless plating. This method can provide 3D arbitrary silver/polymer composite microstructures with sub-micrometer resolution.

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Authors and Affiliations

  1. Nanophotonics Laboratory, RIKEN (The Institute of Physical and Chemical Research), Hirosawa 2-1, Wako, Saitama, 351-0198, Japan

    N. Takeyasu, T. Tanaka & S. Kawata

  2. PRESTO, JST, 4-1-8 Honcho Kawaguchi, Saitama, 322-0012, Japan

    T. Tanaka

  3. Department of Applied Physics, Osaka University, Suita, Osaka, 565-0871, Japan

    S. Kawata

  4. CREST, JST, 4-1-8 Honcho Kawaguchi, Saitama, 322-0012, Japan

    S. Kawata

Authors
  1. N. Takeyasu
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  2. T. Tanaka
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  3. S. Kawata
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Correspondence to N. Takeyasu.

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PACS

81.07-b; 81.16-c; 81.07.Pr

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Takeyasu, N., Tanaka, T. & Kawata, S. Fabrication of 3D metal/polymer microstructures by site-selective metal coating. Appl. Phys. A 90, 205–209 (2008). https://doi.org/10.1007/s00339-007-4298-9

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  • DOI: https://doi.org/10.1007/s00339-007-4298-9

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