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Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating

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Abstract

A cavity processed by a tightly focused femtosecond laser pulse is surrounded by a ring-shaped protrusion, debris, and small droplets. In order to reduce these undesired damages, we propose processing with a coating of transparent material on a target material. PMMA (poly-methyl methacrylate) with the thickness that its surface is not ablated by a single pulse irradiation reduces dissolution and vaporization caused by the interaction between a high-density hot vapor plume and the target material. Furthermore, the material at the target surface does not escape freely due to the coating layer. As a result, a submicrometer-sized cavity is produced with a reduction of debris and a smaller thermal-destruction area.

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Authors and Affiliations

  1. Department of Optical Science and Technology, Faculty of Engineering, The University of Tokushima, 2–1, Minamijosanjima-cho, Tokushima, 770-8506, Japan

    D. Kawamura, A. Takita, Y. Hayasaki & N. Nishida

Authors
  1. D. Kawamura
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  2. A. Takita
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  3. Y. Hayasaki
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  4. N. Nishida
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Corresponding author

Correspondence to Y. Hayasaki.

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PACS

44.10.+i; 61.80.Ba; 79.20.Ds

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Kawamura, D., Takita, A., Hayasaki, Y. et al. Method for reducing debris and thermal destruction in femtosecond laser processing by applying transparent coating. Appl. Phys. A 82, 523–527 (2006). https://doi.org/10.1007/s00339-005-3422-y

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  • DOI: https://doi.org/10.1007/s00339-005-3422-y

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