Skip to main content
SpringerLink
Log in

Ablative thresholds in laser cleaning of substrates from particulates

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

‘Laser cleaning’ thresholds based on the local ablation of substrate material are studied theoretically. Results are compared with the experimental data on the cleaning of silicon wafers from spherical silica particles using laser wavelengths at 248, 532 and 1064 nm. Calculations take into account local enhancement in the laser-light intensity and are based on analytical solutions for the temperature distribution. Influence of vapor atmosphere on cleaning thresholds is studied experimentally and theoretically. Here cleaning is assisted by explosive vaporization of capillary condensed water. A possibility to increase the window for damage-free cleaning by varying the pulse duration and laser wavelength is also discussed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Bäuerle: Laser Processing and Chemistry, 3rd ed. (Springer, Berlin 2000)

  2. Y.F. Lu, Y.W. Zheng, W.D. Song: Appl. Phys. A 68 569 (1999)

    Google Scholar 

  3. N. Arnold, G. Schrems, T. Mühlberger, M. Bertsch, M. Mosbacher, P. Leiderer, D. Bäuerle: Proc. SPIE 4426, 340 (2002)

    Article  ADS  Google Scholar 

  4. M. Arronte, P. Neves, R. Vilar: J. Appl. Phys. 92(12) 6973 (2002)

    Google Scholar 

  5. B. S. Luk’yanchuk, Y.W. Zheng, Y.F. Lu: Proc. SPIE 4423, 115 (2001)

    Article  ADS  Google Scholar 

  6. N. Arnold: Appl. Surf. Sci. 208–209, 15 (2003)

  7. Laser Cleaning, ed. by B. Luk’yanchuk (World Scientific, New Jersey, London 2002) Chapt. 2, 3

  8. B. Luk’yanchuk, N. Arnold, S.M. Huang, Z.B. Wang, M.H. Hong: Appl. Phys. A 77(2), 209 (2003)

    Google Scholar 

  9. H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, A. Pack, R. Wannemacher, B.-U. Runge, D. Bäuerle, P. Leiderer: Proc. SPIE 4426, 180 (2002)

    Article  Google Scholar 

  10. H.-J. Münzer, M. Mosbacher, M. Bertsch, J. Zimmermann, P. Leiderer, J. Boneberg: Journal of Microscopy 202, 129 (2001)

    Article  MathSciNet  Google Scholar 

  11. B. S. Luk’yanchuk, Y.W. Zheng, Y.F. Lu: Proc. SPIE 4065, 576 (2000)

    Article  ADS  Google Scholar 

  12. Yu.A. Kravtsov, Yu.I. Orlov: Caustics, catastrophes and wave fields 2nd ed. (Springer, Berlin 1998)

  13. N. Arnold: Appl. Surf. Sci. 197–198, 904 (2002)

  14. C.E. Bohren, D.R. Huffman: Absorption and Scattering of Light by Small Particles (John Willey & Sons, 1983) p. 169

  15. M. Mosbacher, M. Bertsch, H.-J. Muenzer, V. Dobler, B.-U. Runge, D. Bäuerle, J. Boneberg, P. Leiderer: Proc. SPIE, 4426, 308 (2002); M. Mosbacher, H.-J. Münzer, M. Bertsch, V. Dobler, N. Chaoui, J. Siegel, R. Oltra, D. Bäuerle, J. Boneberg, P. Leiderer, In Particles on Surfaces 7, ed. by K.L. Mittal (VSP Press, Netherlands 2002)

    Article  ADS  Google Scholar 

  16. G. Vereecke, E. Röhr, M.M. Heyns: J. Appl. Phys. 85, 3837 (1999)

    Article  ADS  Google Scholar 

  17. T. Fourrier, G. Schrems, T. Mühlberger, J. Heitz, M. Mosbacher, J. Boneberg, P. Leiderer, N. Arnold, D. Bäuerle: Appl. Phys. A 72, 1 (2001)

    Article  ADS  Google Scholar 

  18. S. Pleasants, N. Arnold, D. Kane: Appl. Phys. A 79, 507 (2004)

    Article  ADS  Google Scholar 

  19. G. Schrems: Ph.D. Thesis (J.-Kepler-University, Linz 2003)

Download references

Author information

Authors and Affiliations

  1. Angewandte Physik, Johannes-Kepler-Universität, 4040, Linz, Austria

    N. Arnold, G. Schrems & D. Bäuerle

Authors
  1. N. Arnold
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. Schrems
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. Bäuerle
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to N. Arnold.

Additional information

PACS

42.62.Cf; 81.65.Cf; 68.35.Np

Rights and permissions

Reprints and permissions

About this article

Cite this article

Arnold, N., Schrems, G. & Bäuerle, D. Ablative thresholds in laser cleaning of substrates from particulates. Appl. Phys. A 79, 729–734 (2004). https://doi.org/10.1007/s00339-004-2644-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-004-2644-8

Keywords

Search

Navigation