Abstract
The lateral resolution of a time-of-flight photoemission electron microscope has been theoretically analyzed. It has been shown that the resolution limit can reach a few nanometers. The lateral resolution will be higher if the photoelectrons forming the image are characterized by a smaller acceptance angle obtained with the help of diaphragms in the crossover plane, a higher initial energy and a narrower interval of electron energies. The experimental results are in good agreement with the theoretical predictions.
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68.37.Xy
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Nepijko, S., Oelsner, A., Krasyuk, A. et al. Lateral resolving power of a time-of-flight photoemission electron microscope. Appl. Phys. A 78, 47–51 (2004). https://doi.org/10.1007/s00339-003-2291-5
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DOI: https://doi.org/10.1007/s00339-003-2291-5