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Non-destructive depth compositional profiles by XPS peak-shape analysis

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Abstract

The measured peak shape and intensity of the photoemitted signal in X-ray photoelectron spectroscopy (XPS) experiments (elastic and inelastic parts included) are strongly correlated, through electron-transport theory, with the depth distribution of photoelectron emitters within the analyzed surface. This is the basis of so-called XPS peak-shape analysis (also known as the Tougaard method) for non-destructive determination of compositional in-depth (up to 6–8 nm) profiles. This review describes the theoretical basis and reliability of this procedure for quantifying amounts and distributions of material within a surface. The possibilities of this kind of analysis are illustrated with several case examples related to the study of the initial steps of thin-film growth and the modifications induced in polymer surfaces after plasma treatments.

Photoemitted spectra and in-depth concentration profiles (blue: oxygen; orange: carbon), obtained by means of XPS peak shape analysis, of a PET plasma activated surface. The shown topography corresponds to an atomic force microscopy image of the treated surface.

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Acknowledgements

We thank the Ministry of Science and Education of Spain (projects MAT2007-65764 and Consolider Funcoat CSD2008-00023) and the Junta de Andalucía (projects TEP2275 and P07-FQM-03298) for financial support.

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Authors and Affiliations

  1. Instituto de Ciencia de Materiales de Sevilla, C/ Américo Vespucio 49, 41092, Sevilla, Spain

    M. C. López-Santos, F. Yubero, J. P. Espinós & A. R. González-Elipe

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  1. M. C. López-Santos
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  2. F. Yubero
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  3. J. P. Espinós
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  4. A. R. González-Elipe
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Correspondence to F. Yubero.

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López-Santos, M.C., Yubero, F., Espinós, J.P. et al. Non-destructive depth compositional profiles by XPS peak-shape analysis. Anal Bioanal Chem 396, 2757–2768 (2010). https://doi.org/10.1007/s00216-009-3312-9

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