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Influence of Fenton-like reactions between hydrogen peroxide and ferric chloride on chemical mechanical polishing 304 stainless steel

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Abstract

Due to its low thermal expansion coefficient and superior water/oxygen isolation properties, smooth 304 stainless steel may become the main substrate material for flexible organic light-emitting diode (FOLED) screens. However, in order to achieve a nano-scale smooth surface, 304 stainless steel substrates must undergo chemical mechanical polishing (CMP). A new type of polishing slurry consisting of hydrogen peroxide and ferric chloride was used to polish 304 stainless steel in our work. The material removal rate exceeds 700 nm/min and the surface roughness is below 5 nm after polishing using the optimized ratio of hydrogen peroxide and ferric chloride. Furthermore, the influence of the Fenton-like reaction between hydrogen peroxide and ferric chloride on chemical mechanical polishing 304 stainless steel is revealed by analyzing the concentration of Fe2+ ion and Fe element in the waste polishing slurry. A Fenton-like reaction occurs, including 2Fe3+ + Fe → 3Fe2+ and 2Fe2+ + H2O2 + 2H+ → 2Fe3+ + 2H2O, which enhances the polishing effect by metal-catalyzed oxidation. Hydrogen peroxide not only acts as an initiator of the Fenton reaction, but also as an inhibitor of the Fenton-like reaction, as it can react with hydroxyl radicals to generate peroxyl radicals.

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Funding

The authors appreciate financial supports from Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, and National Natural Science Foundation of China (Grant Nos. 52075318 and U20A20293).

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Authors and Affiliations

  1. Research Center for Advanced Micro-/Nano- Fabrication Materials, College of Chemistry and Chemical Engineering, Shanghai University of Engineering Science, Shanghai, 201620, People’s Republic of China

    Jiapeng Chen

  2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, National Key Laboratory of Science and Technology On Helicopter Transmission, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, People’s Republic of China

    Jiapeng Chen & Yanan Peng

  3. School of Mechanical & Electrical Engineering, Henan Institute of Science and Technology, Xinxiang, 453003, People’s Republic of China

    Zhankui Wang

  4. Yusheng Energy Technology (Tianchang) Co., LTD, Tianchang, 239300, People’s Republic of China

    Fenggang Lv

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  1. Jiapeng Chen
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  2. Yanan Peng
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  4. Fenggang Lv
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Contributions

Jiapeng Chen*: Conceptualization, Methodology, Software, Validation, Formal analysis, Investigation, Writing—Original Draft, Writing—Review & Editing, Visualization.

Yanan Peng*: Conceptualization, Methodology, Resources, Writing—Review & Editing, Supervision, Funding acquisition, Validation.

Zhankui Wang: Conceptualization, Methodology, Writing—Review & Editing, Supervision.

Fenggang Lv: Writing—Review & Editing.

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Correspondence to Jiapeng Chen or Yanan Peng.

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Chen, J., Peng, Y., Wang, Z. et al. Influence of Fenton-like reactions between hydrogen peroxide and ferric chloride on chemical mechanical polishing 304 stainless steel. Int J Adv Manuf Technol 131, 2667–2675 (2024). https://doi.org/10.1007/s00170-023-12117-2

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