Abstract
To simplify complex optical systems, a next-generation optical component which combines a refractive element and a diffractive element is desirable. To fabricate these next-generation optical components, it is desirable to keep the focal point of the lithographic lens focused on the curved surface. Keeping the focus constant is challenging for a laser process, as well as for measuring and metrology systems. In this study, a coaxial confocal microscopic type commercialized displacement sensor was used to make it easier to fabricate the pattern required for diffractive optical elements (DOEs) on a curved surface, using direct laser lithography. The test results confirmed that a constant line width of 5 μm could be fabricated on a curved surface such as a cylinder and convex lens using the proposed auto-surface tracking system, with a position error of 1 μm. The diffraction pattern fabricated on the curved surface was analyzed for optical performance and compared with mathematical modeling.
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Funding
This research was supported by the Commercialization Promotion Agency for R&D Outcomes (COMPA), “Real-time 3D surface measurement for aspheric and freeform lens,” funded by the Ministry of Science and ICT(MSIT).
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Y.-G. Kim carried out experiments and drafted the manuscript. H.-G. Rhee and Y.-S. Ghim provided the manuscript revise suggestion. All authors read and approved the final manuscript.
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Kim, YG., Rhee, HG. & Ghim, YS. Real-time method for fabricating 3D diffractive optical elements on curved surfaces using direct laser lithography. Int J Adv Manuf Technol 114, 1497–1504 (2021). https://doi.org/10.1007/s00170-021-06862-5
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DOI: https://doi.org/10.1007/s00170-021-06862-5