Skip to main content
SpringerLink
Log in

Performance-controllable manufacture of optical surfaces by ultra-precision machining

  • ORIGINAL ARTICLE
  • Published:
The International Journal of Advanced Manufacturing Technology Aims and scope Submit manuscript

Abstract

As a final evaluation specification, optical performance is important for applications of optical surfaces. However, the traditional evaluation criteria in manufacturing have been the form error and surface roughness, which are compensated to control optical performance indirectly. Previous studies have found that optical performance can differ significantly despite a similar value of form error due to different underlying error distributions. This paper, therefore, proposes a novel approach to directly achieve compensation of optical performance. Manufacturing and optical performance are linked by their primary performance parameters, machining errors and wavefront aberration, respectively. The relationship between these parameters is obtained according to an optical performance evaluation model established using optical ray tracing. The evaluation criterion for manufacturing can, therefore, be linked to wavefront aberration, which can be measured and then compensated after fabrication by an optical performance improvement model. Our experimental results demonstrate the effectiveness of the proposed method, which provides an innovative assistance to directly improve the optical performance and machining accuracy of optical mirrors.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Yang T, Zhu J, Jin GF (2014) Design of freeform imaging systems with linear field-of-view using a construction and iteration process. Opt Express 22:3362–3374

    Article  Google Scholar 

  2. Kidger MJ (2002) Fundamental optical design. SPIE Press, Bellingham

    Google Scholar 

  3. Smith WJ (2008) Modern optical engineering. McGraw-Hill, New York

    Google Scholar 

  4. Zhang YM (2008) Applied optics. Publishing House of Electronics Industry, Beijing

    Google Scholar 

  5. Chen FJ, Yin SH, Huang H, Ohmori H (2010) Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement. Int J Mach Tools Manuf 50:480–486

    Article  Google Scholar 

  6. Lee WB, Cheung CF, Chiu WM, Leung TP (2000) An investigation of residual form error compensation in the ultra-precision machining of aspheric surfaces. J Mater Process Technol 99(1–3):129–134

    Article  Google Scholar 

  7. Chen CC, Huang CY, Peng WJ, Yu ZR, Hsu WY (2013a) Freeform surface machining error compensation method for ultra-precision slow tool servo diamond turning. Proc. SPIE 8838: 88380Y-88380Y-8

  8. Yu DY, Yu LX, Wang S, Tian YH (2015) Surface error analysis and online compensation method for increasing the large-sized cylindrical part’s quality. Int J Adv Manuf Technol 79(5–8):1401–1409

    Article  Google Scholar 

  9. Ma W, He G, Zhu L, Guo L (2016) Tool deflection error compensation in five-axis ball-end milling of sculptured surface. Int J Adv Manuf Technol 84(5–8):1421–1430

    Google Scholar 

  10. Habibi M, Arezoo B, Nojedeh MV (2011) Tool deflection and geometrical error compensation by tool path modification. Int J Mach Tools Manuf 51(6):439–449

    Article  Google Scholar 

  11. Gan SW, Han-Seok L, Rahman M, Watt F (2007) A fine tool servo system for global position error compensation for a miniature ultra-precision lathe. Int J Mach Tools Manuf 47(7–8):1302–1310

    Google Scholar 

  12. Gao W, Mano T, Araki T, Kiyono S, Park CH (2007) Measurement and compensation of error motions of a diamond turning machine. Precis Eng 31(3):310–316

    Article  Google Scholar 

  13. Kong LB, Cheung CF, To S, Lee WB, Dul JJ (2008) A kinematics and experimental analysis of form error compensation in ultra-precision machining. Int J Mach Tools Manuf 48(12–13):1408–1419

    Article  Google Scholar 

  14. Liu XL, Zhang XD, Fang FZ, Zeng Z, Gao HM, Hu XT (2015) Influence of machining errors on form errors of microlens arrays in ultra-precision turning. Int J Mach Tools Manuf 96:80–93

    Article  Google Scholar 

  15. Malacara D (1978) Optical shop testing. Wiley, New York

    Google Scholar 

  16. Southwell WH (1980) Wave-front estimation from wave-front slope measurements. J Opt Soc Am A 70(8):998–1006

    Article  Google Scholar 

  17. Roddier F (1988) Curvature sensing and compensation: a new concept in adaptive optics. Appl Opt 27(7):1223–1225

    Article  Google Scholar 

  18. Chen X (2009) CCD based digital optical transfer function testing instrument. Proc. SPIE 7506: 75062J-75062J-7

  19. Hu Y, Cheng D, Wang Y, Peng H (2015) Effective modulation transfer function measurement method for an off-axis optical system. Appl Opt 54(25):7471–7476

    Article  Google Scholar 

  20. Vernier A, Perrin B, Avignon T, Augereau J, Jacubowiez L (2015) Measurement of the modulation transfer function (MTF) of a camera lens. Proc SPIE 91:1405–1412

    Google Scholar 

  21. Ying C, Wu B, Wang H, Heng F, Xue S, Hong Y (2013) MTF measurement of IRFPA based on double-knife edge scanning method. Proc SPIE 8907:165–189

    Google Scholar 

  22. Goodman JW (1968) Introduction to fourier optics. McGraw-Hill, New York

    Google Scholar 

  23. Levy E, Peles D, Opher-Lipson M, Lipson SG (1999) Modulation transfer function of a lens measured with a random target method. Appl Opt 38(4):679–683

    Article  Google Scholar 

  24. Malacarahernández D, Malacarahernández Z (2013) Handbook of optical design. CRC Press, Florida

    Google Scholar 

  25. Gerchberg RW (1971) A practical algorithm for the determination of phase from image and diffraction plane pictures. Optik 35(2):237–250

    Google Scholar 

  26. Liu TR, Qiu X, Li H, Yan LL, Chao X, Yong H, Xiao QZ (2013) The simulation study of the influence of surface error on optical properties for optical part. Adv Mater Res 690-693:3027–3031

    Article  Google Scholar 

  27. Lawson JK, Aikens DM, English RE, Wolfe CR (1996) Power spectral density specifications for high-power laser systems. Proc SPIE 2775:345–356

    Article  Google Scholar 

  28. Lawson JK, English RE, Sacks RA, Trenholme JB, Williams WH, Cotton CT (1998) NIF optical specifications: the importance of the RMS gradient. Proc SPIE 3492:336–343

    Article  Google Scholar 

  29. Harvey JE, Thompson AK (1995) Scattering effects from residual optical fabrication errors. Proc SPIE 2576:155–174

    Article  Google Scholar 

  30. Tamkin JM, Milster TD, Dallas W (2010) Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing. Appl Opt 49(25):4825–4835

    Article  Google Scholar 

  31. Liu XL, Zhang XD, Fang FZ, Liu SG (2016) Identification and compensation of main machining errors on surface form accuracy in ultra-precision diamond turning. Int J Mach Tools Manuf 105:45–57

    Article  Google Scholar 

  32. Fitzgibbon AW (2003) Robust registration of 2D and 3D point sets. Image Vis Comput 21(13–14):1145–1153

    Article  Google Scholar 

  33. Chen G, Liang Y, Sun Y, Chen W, Wang B (2013b) Volumetric error modeling and sensitivity analysis for designing a five-axis ultra-precision machine tool. Int J Adv Manuf Technol 68(9):2525–2534

    Article  Google Scholar 

  34. Burke J, Wang K, Bramble A (2009) Null test of an off-axis parabolic mirror. II. Configuration with planar reference wave and spherical return surface. Opt Express 17(5):3242–3254

    Article  Google Scholar 

Download references

Acknowledgements

The authors would like to express their sincere thanks to Y.B. Lu and Y. X. Xiang for the preparation of experiments.

Funding

This work was supported by the National Natural Science Foundation (Grant No. 51375337, 61635008, and 51320105009).

Author information

Authors and Affiliations

  1. State Key Laboratory of Precision Measuring Technology and Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin, 300072, China

    Xianlei Liu, Xiaodong Zhang, Fengzhou Fang & Zhen Zeng

Authors
  1. Xianlei Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Xiaodong Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Fengzhou Fang
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Zhen Zeng
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Xiaodong Zhang.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Liu, X., Zhang, X., Fang, F. et al. Performance-controllable manufacture of optical surfaces by ultra-precision machining. Int J Adv Manuf Technol 94, 4289–4299 (2018). https://doi.org/10.1007/s00170-017-1074-7

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00170-017-1074-7

Keywords

Search

Navigation