Abstract
Subsurface damage (SSD) induced during the abrasive machining process considerably influences the technological application of the optical components. However, to date, there is no rapid and effective method to inspect the depth of SSD. For the purpose of precise and nondestructive evaluation of the SSD depth generated in rotary ultrasonic machining (RUM) and conventional grinding (CG) processes, a theoretical model, ground on indentation fracture mechanics of brittle material, was proposed by analyzing the correlation between the median and lateral crack systems aroused by a sharp indenter. It was found that the SSD depth was nonlinear monotone increasing with square of surface roughness (SR), namely, SSD = χSR2 + l. Utilizing this model, the SSD depth could be quickly and precisely predicted through the SR (p–v value.) of the machined surface, geometrical features of the abrasive, and the material mechanical properties. To validate the feasibility of this method, both RUM and CG tests were conducted on the BK7 glass specimens with a Sauer Ultrasonic 20. Subsequently, the SSD of these specimens was exposed with the polishing–etching technique. The measurement results of SSD depth were consistent with the prediction values of this model, which reflected the feasibility of using this model to rapidly and accurately predict the SSD depth.
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References
Li Y, Zheng N, Li H, Hou J (2010) Morphology and distribution of subsurface damage in optical fused silica parts: bound-abrasive grinding. Appl Surf Sci 257(6):2066–2073
Wang J, Li Y (2011) Evaluating subsurface damage in optical glasses. J Eur Opt Soc-Rapid 6:11001
Miller PE, Suratwala TI, Wong LL, Feit MD (2005) The distribution of subsurface damage in fused silica. P SPIE 5991:1–25
Stolz CJ, Menapace JA, Schaffers KI, Bibeau C, Thomas MD, Griffin AJ (2005) Laser damage initiation and growth of antireflection coated S-FAP crystal surfaces prepared by pitch lap and magnetorheological finishing. P SPIE 5991:449–455
Zhang W, Zhu J (2009) Controlling subsurface damage in neodymium-doped phosphate glass. Optik 120:752–757
Suratwala T, Wong L, Miller P, Feit MD, Menapace J, Steele R, Davis P, Walmer D (2006) Sub-surface mechanical damage distributions during grinding of fused silica. J Non-Cryst Solids 352:5601–5617
Yoshikawa M, Zhang B, Tokura H (1987) Observations of ceramics surface cracks by newly proposed methods. J Ceram Soc Jpn 95:961–969
Zhou Y, Funkenbusch PD, Quesnel DJ, Golini D, Lindquist A (1994) Effect of etching and imaging mode on the measurement of subsurface damage in microground optical glasses. J Am Ceram Soc 77:3277–3280
Li S, Wang Z, Wu Y (2008) Relationship between subsurface damage and surface roughness of optical materials in grinding and lapping processes. J Mater Process Tech 205:34–41
Affatigato M, Osborne DH, Haglund RF (1996) Effect of surface roughness on the acid etching of amorphous silica. J Am Ceram Soc 79:688–694
Ellingson JA, Todd JA, Sun J (2001) Optical method and apparatus for detection of defects and microstructural changes in ceramics and ceramic coatings. US Patent 6285449 B1
Neauport J, Cormont P, Legros P, Amdard C, Destribats J (2009) Imaging subsurface damage of grinded fused silica optics by confocal fluorescence microscopy. Opt Express 17:3543–3554
Meeder M, Mauret T, Booij S, Braat J, Fahnle O (2003) Optimization of polishing processes by using iTIRM for in-situ monitoring of surface quality. P SPIE 5180:40–46
Guss GM, Bass IL, Hackel RP, Maihiot C, Demos SG (2008) In situ monitoring of surface postprocessing in large-aperture fused silica optics with optical coherence tomography. Appl Optics 47:4569–4573
Hellier CJ (2003) Handbook of nondestructive evaluation. McGraw-Hill, New York
Suratwala T, Miller P, Feit M, Menapace J (2008) Scratch forensics. Opt Photonic News 20(9):12–15
Hed PP, Edwards DF (1987) Relationship between subsurface damage depth and surface roughness during grinding of optical glass with diamond tools. Appl Optics 26:2491
Randi JA, Lambropoulos JC, Jacobs SD (2005) Subsurface damage in some single crystalline optical materials. Appl Optics 44:2241–2249
Preston FW (1922) The structure of abraded glass surfaces. T Opt Soc 23:141–164
Neauport J, Ambard C, Cormont P, Darbois N, Destribats J, Luitot C, Rondeau O (2009) Subsurface damage measurement of ground fused silica parts by HF etching techniques. Opt Express 17:20448–20456
Lambropoulos JC, Jacobs SD, Gillman B, Yang F, Ruck-man J (1997) Subsurface damage in microgrinding optical glasses. LLE Review 73:45–49
Lambropoulos JC, Jacobs SD, Ruckman J (1999) Material removal mechanisms from grinding to polishing. Ceram Trans 102:113–128
Kendall PW (1964) Etching polished depressions in glass plates. J Sci Instrum 41:485
Li Y, Huang H, Xie R, Li H (2010) A method for evaluating subsurface damage in optical glass. Opt Express 18:17180–17186
Wang Z, Wu Y, Dai Y, Li S (2008) Subsurface damage distribution in the lapping process. Appl Optics 47:1417–1426
Hed PP, Edwards DF (1987) Optical glass fabrication technology. 2: Relationship between surface roughness and subsurface damage. Appl Optics 26(21):4677–4680
Cook RF, Pharr GM (1990) Direct observation and analysis of indentation cracking in glasses and ceramics. J Am Ceram Soc 73(4):787–817
Conway JC, Kirchner HP (1980) The mechanics of crack initiation and propagation beneath a moving sharp indentor. J Mater Sci 15(11):2879–2883
Lawn BR, Swain MV (1975) Microfracture beneath point indentations in brittle solids. J Mater Sci 10(1):113–122
Johnson KL (2004) Contact mechanics. Cambridge University Press, New York
Marshall DB (1983) Geometrical effects in elastic/plastic indentation. J Am Ceram Soc 67(1):57–60
Gu W, Yao Z (2011) Evaluation of surface cracking in micron and sub-micron scale scratch tests for optical glass BK7. J Mech Sci Technol 25(5):1167–1174
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Appendix
Appendix
Solutions for the Boussinesq stress field due to a normal concentrated load P in spherical coordinates (r,θ,φ) of an elastic half-space are shown in Fig. 8. The stress components were:
The magnitudes and directions of the principal stress components could be provided by suitable tensor transformations. The three principal normal stresses could be written as:
where σ 22 is perpendicular to the symmetry plane everywhere. σ 11 and σ 33 are contained in the symmetry plane θ = constant. The angle between the specimen surface and σ 11 and σ 33 was given by
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Lv, D., Huang, Y., Tang, Y. et al. Relationship between subsurface damage and surface roughness of glass BK7 in rotary ultrasonic machining and conventional grinding processes. Int J Adv Manuf Technol 67, 613–622 (2013). https://doi.org/10.1007/s00170-012-4509-1
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DOI: https://doi.org/10.1007/s00170-012-4509-1