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Some recent advances in multi-material micro- and nano-manufacturing

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Abstract

The increasing demand for micro-products and components can be met only partly by the lithography-based micro-electromechanical systems fabrication processes that originated from the silicon-based microelectronics revolution of the late twentieth century. In particular, such processes have limitations when applied to new micro-devices which require the use of a variety of materials and complex 3D microstructures with high aspect ratios. In this context, the paper presents technologies complementary to lithography-based processes for the manufacture of devices or components incorporating micro- and nano-scale features. More specifically, special attention is given to the main findings obtained over the last 5 years from the authors’ research programme on a range of micro- and nano-manufacturing technologies, namely, micro-electrodischarge machining, laser ablation, micro-milling, focussed-ion beam machining, micro-injection moulding, nano-imprint lithography, hot embossing and electroforming.

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Authors and Affiliations

  1. Manufacturing Engineering Centre, Cardiff University, Queen’s Buildings, The Parade, Newport Road, Cardiff, CF24 3AA, UK

    E. B. Brousseau, S. S. Dimov & D. T. Pham

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  1. E. B. Brousseau
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  2. S. S. Dimov
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  3. D. T. Pham
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Correspondence to E. B. Brousseau.

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Brousseau, E.B., Dimov, S.S. & Pham, D.T. Some recent advances in multi-material micro- and nano-manufacturing. Int J Adv Manuf Technol 47, 161–180 (2010). https://doi.org/10.1007/s00170-009-2214-5

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  • DOI: https://doi.org/10.1007/s00170-009-2214-5

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