Single-stage microleverage mechanism optimization in a resonant accelerometer

Abstract.

Microleverage mechanisms have potentially wide applications in Micro-Electro-Mechanical Systems (MEMS) for achieving mechanical or geometrical advantages. Constrained by micro-fabrication technology, microleverage mechanisms are formed by planar flexures and referred to as compliant mechanisms. In this paper, the analysis and optimization of a single-stage compliant microleverage mechanism is presented, with double-ended tuning fork (DETF) as the output system in a resonant accelerometer to address design issues. It is found that the axial and rotational spring constants of the output system can significantly influence the amplification factor and need to match those of a pivot (with high axial spring constant and low rotational spring constant being desirable) in order to achieve maximum force amplification. This compliance-match theory is very important for the design of both single-stage and multiple-stage microleverage mechanisms.