Two-stage compliant microleverage mechanism optimization in a resonant accelerometer

Abstract.

Compliant microleverage mechanisms can be used in micro-electro-mechanical systems (MEMS) to transfer an input force/displacement to an output to achieve mechanical/geometrical advantages. By stacking multiple stages of microlevers together, a compound microleverage mechanism is obtained with a higher amplification factor. This paper presents the analysis and optimization of a two-stage microleverage mechanism in a resonant output micro-accelerometer for force amplification. It is found that the compliance of the two-stage mechanism needs to be appropriately distributed in order for both stages to have the desired amplification effect.