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The initial growth of vapour deposited gold films

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Abstract

Gold films are extensively used in the production of both ohmic- and Schottky-type electrical contacts to semiconductors. Although their growth by vapour deposition has been extensively studied, much less is known of the stages which precede than those which follow nucleation. The pre-nucleation stages of the growth of gold films on clean and ordered as well as contaminated surfaces of silicon and gallium arsenide (GaAs) are the subject of the present review. It covers the interactions of submonolayer amounts of gold with semiconductor surfaces of these two types and subsequent film growth to a thickness of a few monolayers.

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References

  1. B. Lewis and J. C. Anderson, ‘Nucleation and Growth of Thin Films’, Academic Press, London, 1978

    Google Scholar 

  2. J. C. Robins,Surf. Sci., 1979,86, 1–13

    Article  CAS  Google Scholar 

  3. G. Le Lay and R. Kern,J Cryst. Growth, 1978,44, 197–222

    Article  Google Scholar 

  4. F. C. Frank and J. H. van der Merwe,Proc. Roy. Soc., 1949,A198, 216

    Google Scholar 

  5. M. D. Chinn and S. C. Fain, Jr.,Phys. Rev. Lett., 1977,39, 146–149

    Article  CAS  Google Scholar 

  6. C. R. Henry, C. Chapon and B. Mutaftschiev,Thin Solid Films, 1977,46, 157–165

    Article  CAS  Google Scholar 

  7. G. Ertl and J. Küppers, ‘Low Energy Electrons and Surface Chemistry’., Verlag Chemie, Weinheim, 1974

    Google Scholar 

  8. H. Ibach, ‘Electron Spectroscopy for Surface Analysis’, Springer-Verlag, Berlin, Heidelberg, New York, 1977

    Google Scholar 

  9. M. D. Matthews and P. F. James,Philos. Mag., 1969,19, 1179–1188

    Article  CAS  Google Scholar 

  10. H. E. Bishop and J. C. Rivière,Br. J. Appl. Phys., (J. Phys. D), 1969,21, 1635–1642

    Google Scholar 

  11. A. Hiraki, M.-A. Nicolet and J. W. Mayer,Appl. Phys. Lett., 1971,18, 178–181

    Article  CAS  Google Scholar 

  12. A. Hiraki, E. Lugujjo, M.-A. Nicolet and J. W. Mayer,Phys. Status Solidi, 1971,a7, 401–406

    Google Scholar 

  13. A Hiraki and E. Lugujjo,J. Vac. Sci. Technol. 1972,9, 155

    Article  CAS  Google Scholar 

  14. A. Hiraki, E. Lugujjo and J. W. Mayer,J Appl. Phys., 1972,43, 3643–3649

    Article  CAS  Google Scholar 

  15. T. Narusawa, S. Komiya and A. Hiraki,Appl. Phys. Lett., 1972,22, 272–273

    Article  Google Scholar 

  16. T. Narusawa, S. Komiya and A. Hiraki,Appl. Phys. Lett., 1973,22, 389–390

    Article  CAS  Google Scholar 

  17. A. Hiraki, A. Shimizu, M. Iwami, T. Narusawa and S. Komiya,Appl. Phys. Lett., 1975,26, 57–60

    Article  CAS  Google Scholar 

  18. A. K. Green and E. Bauer,J. Appl. Phys., 1976,47, 1284–1291

    Article  CAS  Google Scholar 

  19. G. Le Lay and J. P. Faurie,Surf. Sci., 1977,69, 295–300

    Article  Google Scholar 

  20. L. Braicovich, C. M. Garner, P. R. Skeath, C. Y. Su, P. W. Chye, I. Lindau and W. E. Spicer,Phys. Rev. B., 1979,20, 5131–5141

    Article  CAS  Google Scholar 

  21. K. Oura, Y. Makino and T. Hanawa,Jpn. J. Appl. Phys., 1976,15, 737–738

    Article  CAS  Google Scholar 

  22. K. Oura and T. Hanawa,Surf. Sci., 1979,82, 202–214

    Article  CAS  Google Scholar 

  23. J. Abbati, L. Braicovich, A. Franciosi, I. Lindau, P. R. Skeath, C. Y. Su and W. E. Spicer,J. Vac. Sci. Technol., 1980,17, 930–935

    Article  CAS  Google Scholar 

  24. G. Le Lay, M. Manneville and R. Kern,Surf, Sci., 1977,65, 261–276

    Article  Google Scholar 

  25. J. O. McCaldin and T. C. McGill, in ‘Thin Films Interdiffusion and Reactions’, edited by J. M. Poate, K. N. Tu and J. W. Mayer, John Wiley and Sons, New York, 1978, pp. 69–80

    Google Scholar 

  26. A. K. Sinha and J. M. Poate, in ‘Thin Films Interdiffusion and Reactions’, edited by J. M. Poate, K. N. Tu and J. W. Mayer, John Wiley and Sons, New York, 1978, pp. 407–432

    Google Scholar 

  27. S. P. Kowalczyk, J. R. Waldrop and R. W. Grant,Appl. Phys. Lett. 1981,38, 167–169

    Article  CAS  Google Scholar 

  28. J. S. Vermaak, L. W. Snyman and F. D. Auret,J Cryst. Growth, 197742, 132–135

    Article  CAS  Google Scholar 

  29. K. Takeda, T. Hanawa and T. Shimojo, in ‘Proc. 6th Internat. Vacuum Congr., 1974’, Jpn. J. Appl. Phys. Suppl. 1974, 2, Pt. 1, pp. 589–592

    Google Scholar 

  30. W. Gudat and D. E. Eastman,J. Vac. Sci. Technol. 1976,13, 831–837

    Article  CAS  Google Scholar 

  31. P. W. Chye, I. Lindau, P. Pianetta, C. M. Garner, C. Y. Su and W. E. Spicer,Phys. Rev., 1978,B18, 5545–5559

    Google Scholar 

  32. T. G. Andersson and S. P. Svensson,Surf Sci., 1981 submitted

  33. P. Drathen, W. Ranke and K. Jakobi,Surf. Sci., 1978,77, L162-L166

    Article  CAS  Google Scholar 

  34. L. J. Brillson, R. S. Bauer, R. Z. Bachrach and G. Hansson,Appl. Phys. Lett., 1980,36, 326–328

    Article  CAS  Google Scholar 

  35. L. J. Brillson, G. Margaritondo and N. G. Stoffel,Phys, Rev. Lett., 1980,44, 667–670

    Article  CAS  Google Scholar 

  36. L. J. Brillson, G. Margaritondo, N. G. Stoffel, R. S. Bauer, R. Z. Bachrach and G. Hansson,J. Vac. Sci. Technol., 1980,17, 880–885

    Article  CAS  Google Scholar 

  37. T. G. Andersson,J. Appl. Phys., 1982 submitted

  38. K. S. Liang, W. R. Salaneck and J. A. Aksay,Solid State Commun., 1976,19, 329–334

    Article  CAS  Google Scholar 

  39. H. Takeuchi, H. Fujimoto, K. Ishii and K. Kinosta,Thin Solid Films, 1979,57, 291–292

    Article  CAS  Google Scholar 

  40. M. Paunov and M. Harsdorff,Z. Naturforsch. 1974,29a, 1311–1318

    Google Scholar 

  41. R. Anton and M. Harsdorff,Thin Solid Films, 1974,22, S23-S26

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Physics, Chalmers University of Technology, Göteborg, Sweden

    Thorwald G. Andersson

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  1. Thorwald G. Andersson
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Andersson, T.G. The initial growth of vapour deposited gold films. Gold Bull 15, 7–18 (1982). https://doi.org/10.1007/BF03216565

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