Abstract
The soft X-ray interferometry is completed by the Mach-Zehnder interferometer using a soft X-ray laser, and it is also an important method to measure the electron densities of a laser-produced plasma near the critical surface. It is apparently demonstrated in this paper that the incident angle of each optical element in the soft X-ray Mach-Zehnder interferometer should be near normal incidence based on the polarized characteristics of the soft X-ray multilayers, and the product of reflectivity and transmission of the beam splitter should be taken as a standard of design according to the structure of the soft X-ray Mach-Zehnder interferometer. The beam splitters used in the soft X-ray interferometry at 13.9 nm are fabricated using the ion beam sputtering. The figure error of the beam splitter has reached the nanometer magnitude, in which the product of reflectivity and transmission of the beam splitter is more than 1.6%.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
DaSilva, L. B., Barbee, T. W., Cauble, R. et al., Electron density measurements of high density plasma using soft X-ray laser interferometry, Phys. Rev. Lett., 1995, 74(20): 3991–3994.
Ress, D., DaSilva, L. B., London, R. A., et al., Measurement of laser-plasma electron density with a soft X-ray laser deflectometer, Science, 1994, 265: 514–517.
Cauble, R. DaSilva, Cauble, L. B., Barbee, T. W. et al., Micron-resolution radiography of laser-accelerated and X-ray heated foils with an X-ray laser, Phys. Rev. Lett., 1995, 74(19): 3816–3819.
Wang, C., Gu, Y., Wang, S. J. et al., Experimental studies of Ni-like Ag X-ray laser and its application, High Power Laser and Particle Beams, 2002, 14(3): 381–384.
Wang, C., Fu, S. Z., Gu, Y. et al., A Moire deflectometer used to measure high temperature plasma electron density, High Power Laser and Particle Beams, 2000, 12(2): 467–470.
Wang, Z., Ma, Y., Researches on extreme ultraviolet multilayers fabrication, Optical Technology, 2001, 27(6): 532–534.
Slaughter, J. M., Schulze, D. W., Hills, C. R. et al., Structure and performance of Si/Mo multiplayer mirrors for the extreme ultraviolet, J. Appl. Phys., 1994, 76(4): 2144–2156.
Streams, D. G., The scattering of X-rays from nonideal multilayer structures, J. Appl. Phys., 1989, 65(2): 491–506.
Windt, D. L., Surface finish requirements for soft X-ray mirrors, Appl. Opt., 1994, 33(10): 2025–2034.
Author information
Authors and Affiliations
Corresponding author
About this article
Cite this article
Wang, Z., Wu, Y., Tang, W. et al. Fabrication of the beam splitters for soft X-ray laser application. Chin. Sci. Bull. 48, 1930–1933 (2003). https://doi.org/10.1007/BF03183980
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF03183980