Abstract
The out-of-plane thermal expansion coefficient α⊥ of biphenyldianhydride-phenylenediamine (BPDA-PDA) polyimide thin film between 20 and 400°C has been measured using a laser spot scanning interferometer. The α⊥ varies from 100 ppm/°C at 20°C to 400 ppm/°C at 400°C. As the result of highly anisotropic microstructure, the α⊥ is much larger than the in-plane thermal expansion coefficient α∥ and increases dramatically when the temperature exceeds the glass transition temperature (≈320°C).
References
For example, see DuPontHigh Density Interconnection Conf. Proc. (1990).
U.S. Patent No. 511,5090 (IBM Corp, K.G. Sachdev et al.)
S. Herminghaus, D. Boese, D.Y. Yoon and B.A. Smith,Appl. Phys. Lett. 59, 1043 (1991).
D. Boese, S. Herminghaus, D.Y. Yoon, J.D. Swalen and J.F. Rabolt,Mat. Res. Soc. Symp. Proc. 227, 379 (1991).
S.T. Chen (to be unpublished).
Custom built by IBM German Manufacturing Technology Center.
G. Makosch and B. Solf,Proc. SPIE 316, 42 (1981).
J. Kempf, M. Nonnenmacher and H.H. Wagner,Appl. Phys. A 47, 137 (1988).
J. Kempf and H.H. Wagner,Topics in Current Physics Vol. 37:Thin Film and Depth Profile Analysis, ed. H. Oechsner, Springer Verlag, p. 87 (1984).
G. Elsner, J. Kempf, J.W. Bartha and H.H. Wagner,Thin Solid Films 185, 189 (1991).
R.E. Jones,Appl. Phys. Lett. 50, 725 (1987).
D.Y. Yoon, W. Parrish, L.E. Depero and M. Ree,Mat. Res. Soc. Symp. Proc. 227, 387 (1991).
S. Numata and N. Kinjo,Poly. Eng. and Sci. 28, 906 (1988).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chen, S.T., Wagner, H.H. Out-of-plane thermal expansion coefficient of biphenyldianhydride-phenylenediamine polyimide film. J. Electron. Mater. 22, 797–799 (1993). https://doi.org/10.1007/BF02817357
Received:
Issue Date:
DOI: https://doi.org/10.1007/BF02817357