Abstract
Synthesis of swift heavy ion induced metal silicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 × 1012, 5 × 1013 and 1 × 1014 cm−2. Formation of different phases of cobalt silicide is identified by the grazing incidence X-ray diffraction (GIXRD) technique, which shows enhancement of intermixing and silicide formation as a result of irradiation.I–V characteristics at Co/Si interface were undertaken to understand the irradiation effect on conduction mechanism at the interface.
Similar content being viewed by others
References
Assmann W, Dobler M, Avasthi D K, Kruijer S, Mieskes H D and Nolte H 1998Nucl. Instrum. Meth. Phys. Res. B146 271
Bolse W and Schattat B 2002Nucl. Instrum. Meth. Phys. Res. B190 173
Chaudhary S, Biswas S, Gupta A, Avasthi D K, Bhattacharyya D, Teichert S and Sarkar D K 2004Nucl. Instrum. Meth. Phys. Res. B217 589
Dhar S, Schaaf P, Lieb K P, Bibic N, Milosavljevic M, Sajavaara T, Keinonen J and Traverse A 2003Nucl. Instrum. Meth. Phys. Res. B205 741
Diva K, Kabiraj D, Chakraborty B R, Shivaprasad S M and Avasthi D K 2004Nucl. Instrum. Meth. Phys. Res. B222 169
Dufour C, Bauer Ph, Marchal G and Jousset J C 1993Europhysics Lett. 21 671
Gambino J P and Colgan E G 1998Mater. Chem. Phys. 52 99
Kim G B, Kwak J S and Baik H K 1997J. Appl. Phys. 82 2323
Kraft S, Schattat B and Bolse W 2002J. Appl. Phys. 91 1129
Masoud N M, Arafah D E and Beeker K H 2002Nucl. Instrum. Meth. Phys. Res. B198 64
Milosavljevic M, Shao G, Bibic N, McKinty C N, Javnes C and Homewood K P 2002Nucl. Instrum. Meth. Phys. Res. B188 166
Murarka S P 1983Silicides for VLSI applications (New York: Academic Press)
Wang Z G, Dufour C, Paumier E and Toulemonde M 1994J. Phys. Condens. Matter 6 6733
Yang Z, Homewood K P, Finney M S, Harry M A and Reeson K J 1995J. Appl. Phys. 78 1958
Zeigler J F, Biersack J P and Littmark U 1985The stopping and ranges of ions in solids (New York: Pergamon)
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Agarwal, G., Jain, A., Agarwal, S. et al. Structural and electrical properties of swift heavy ion beam irradiated Co/Si interface. Bull Mater Sci 29, 187–191 (2006). https://doi.org/10.1007/BF02704614
Received:
Revised:
Issue Date:
DOI: https://doi.org/10.1007/BF02704614