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Magnetron sputtered transparent conducting CdO thin films

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Abstract

Thin films of cadmium oxide have been produced by dc reactive magnetron sputtering in nitrogen and oxygen atmosphere. The structural, optical, and electrical characterization of these films are investigated. Structural analysis indicates that the films are polycrystalline and cubic. Composition analysis by Rutherford backscattering spectrometry has been made and it is found that the films contain excess cadmium and deficient oxygen. It is observed from the optical properties that the films possess a transmittance of about 85% in the visible and near infrared regions of the spectrum and direct bandgap values in the range 2.50 to 2.68 eV for films of thicknesses 146 to 177 nm. Electrical measurements point out that the films have resistivity, carrier concentration, and mobility in the range 2.65 to 6.64 × 10-6 Ωm, 1.60 to 2.35 × 1026 m-3, and 57.65 to 100.48 × 10−4 m2 v−1 s−1 respectively.

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Authors and Affiliations

  1. Thin Film Laboratory, Department of Physics, Bharathiar University, 641 046, Coimbatore, India

    K. Gurumurugan, D. Mangalaraj & S. A. K. Narayandass

Authors
  1. K. Gurumurugan
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  2. D. Mangalaraj
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  3. S. A. K. Narayandass
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Gurumurugan, K., Mangalaraj, D. & Narayandass, S.A.K. Magnetron sputtered transparent conducting CdO thin films. J. Electron. Mater. 25, 765–770 (1996). https://doi.org/10.1007/BF02666538

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  • DOI: https://doi.org/10.1007/BF02666538

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