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Losses in tantalum pentoxide waveguides

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Abstract

Thin films of tantalum pentoxide for possible use as waveguides have been prepared by reactive sputtering and by thermal and anodic oxidation of sputtered tantalum films. Measurements have been made of the losses in these films for different guided modes. These results have been analyzed to determine the loss mechanism. The losses do not fit the Rayleigh scattering theory precisely and the deviation is attributed to absorption by impurities at the surface as well as in the bulk. The effects of bulk and surface loss mechanisms have been obtained and causes of these are discussed.

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Authors and Affiliations

  1. Bell-Northern Research, Ottawa, Ontario, Canada

    Y. C. Cheng & W. D. Festwood

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  1. Y. C. Cheng
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  2. W. D. Festwood
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Cheng, Y.C., Festwood, W.D. Losses in tantalum pentoxide waveguides. J. Electron. Mater. 3, 37–50 (1974). https://doi.org/10.1007/BF02654545

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  • DOI: https://doi.org/10.1007/BF02654545

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