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Stability of metal/GaAs-lnterfaces: A phase diagram survey

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Abstract

Calculated phase diagrams of ternary Ga-As-metal systems for the metals Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Re, Os, Rh, Ir, Ni, Pd, Pt, Cu, Ag and Au are presented. The predictive calculations are based on the following simplifications: Ternary phases and solid solubilities are disregarded and the Gibbs energy of formation of binary compounds is estimated by the enthalpy of formation and calculated from Miedema’s model. The predicted diagrams agree surprisingly well with experimental data and they may be useful for the many cases where data are lacking or fragmentary. The phase diagrams and the thermodynamic data are shown to be a powerful tool for the understanding of interface reactions of metallic contacts to GaAs and hence for the development of improved contact materials.

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  1. Metallurgical Center, Technical University Clausthal, Robert-Koch-Str. 42, D-3392, Clausthal-Zellerfeld, FRG

    Rainer Schmid-Fetzer

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Schmid-Fetzer, R. Stability of metal/GaAs-lnterfaces: A phase diagram survey. J. Electron. Mater. 17, 193–200 (1988). https://doi.org/10.1007/BF02652151

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  • DOI: https://doi.org/10.1007/BF02652151

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