Skip to main content
SpringerLink
Log in

Sputtering of Cu atoms by Ar ions

  • Published:
Applied Physics A Aims and scope Submit manuscript

Abstract

Sputtering of Cu single-crystal, polycrystal and amorphous targets by 5 keV Ar ions has been studied by the binary collision lattice simulation code Cosipo. The sputtering yields, angular distributions, energy distributions and the space distributions of the original positions of the sputtered Cu atoms have been calculated. The results are discussed within the framework of cascade generations and surface structure.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P. Sigmund: Phys. Rev.184, 383 (1969)

    Article  ADS  Google Scholar 

  2. G. Falcone, R. Kelly, A. Oliva: Nucl. Instr. Meth. B18, 399 (1987)

    Article  Google Scholar 

  3. H.E. Roosendaal, U. Littmark, J.B. Sanders: Phys. Rev. B26, 5261 (1982)

    Article  ADS  Google Scholar 

  4. K.T. Waldeer, H.M. Urbassek: Nucl. Instr. Meth. B18, 518 (1987)

    Article  Google Scholar 

  5. M. Hautala, H. Whitlow: Nucl. Instr. Meth. B6, 466 (1985)

    Article  ADS  Google Scholar 

  6. H. Whitlow, M. Hautala: Nucl. Instr. Meth. B18, 370 (1987)

    Article  Google Scholar 

  7. R.H. Silsbee: J. Appl. Phys.28, 1246 (1957)

    Article  Google Scholar 

  8. C. Lehmann, P. Sigmund: Phys. Stat. Solidi16, 507 (1966)

    Google Scholar 

  9. M.A. Kirk, T.H. Blewitt, T.L. Scott: Phys. Rev. B15, 2914 (1977)

    Article  ADS  Google Scholar 

  10. V.I. Shulga: Rad. Eff.70, 65 (1983);82, 169 (1984);84, 1 (1985)

    Google Scholar 

  11. D.E. Harrison, Jr., W.L. Moore, H.T. Holcombe: Rad. Eff.17, 167 (1973)

    Google Scholar 

  12. M. Hou, W. Eckstein: Nucl. Instr. Meth. B13, 324 (1986)

    Article  ADS  Google Scholar 

  13. H.H. Andersen, H.L. Bay:Sputtering by Particle Bombardment 1, ed. by R. Behrisch (Springer, Berlin 1981) pp. 145–218

    Google Scholar 

  14. D. Onderdelinden: Can. J. Phys.46, 739 (1968)

    ADS  Google Scholar 

  15. H.E. Roosendaal:Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer, Berlin 1981) p. 219

    Google Scholar 

  16. D.E. Harrison, Jr.: Rad. Eff.70, 1 (1983)

    Google Scholar 

  17. D.E. Harrison, Jr., M. Jakas: Rad. Eff.99, 263 (1986)

    Google Scholar 

  18. M.T. Robinson:Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer, Berlin 1981) pp. 73–144

    Google Scholar 

  19. H.H. Andersen: Nucl. Instr. Meth. B18, 321 (1987)

    Article  Google Scholar 

  20. W. Eckstein, J.P. Biersack: Appl. Phys.A34, 73 (1984)

    ADS  Google Scholar 

  21. D.S. Karpuzov:Nucl. Instr. Meth. B 19/20, 109 (1987)

    Article  Google Scholar 

  22. M. Hou, M.T. Robinson: Appl. Phys.18, 381 (1979)

    Article  ADS  Google Scholar 

  23. M. Hautala: Phys. Rev.B30, 5010 (1984)

    ADS  Google Scholar 

  24. H. Oechsner:Z. Physik 261, 37 (1973)

    Article  Google Scholar 

  25. J. Lindhard, M. Scharff: Mat. Fys. Medd. Dan. Vid. Selsk.27, No. 15 (1953)

  26. M. Jakas, D.E. Harrison, Jr.: Phys. Rev.B30, 3573 (1984)

    ADS  Google Scholar 

  27. E.S. Mashkova, V.A. Molchanov, V.I. Shulga: Rad. Eff.62, 107 (1982)

    Google Scholar 

  28. M. Hou, M.T. Robinson: Appl. Phys.17, 371 (1978)

    Article  ADS  Google Scholar 

  29. C.E. Carlston, G.D. Magnuson, A. Comeaux, P. Mahadevan: Phys. Rev.138, A 759 (1965)

    Article  ADS  Google Scholar 

  30. J.J.Ph. Elich, H.E. Roosendaal, D. Onderdelinden: Rad. Eff.10, 175 (1971)

    Google Scholar 

  31. G.K. Wehner: J. Appl. Phys.26, 1056 (1955); Phys. Rev.102, 690 (1956)

    Article  Google Scholar 

  32. M. Szymonski, W. Huang, J. Onsgaard: Nucl. Instr. Meth.B14, 263 (1986)

    ADS  Google Scholar 

  33. C.H. Weijsenfeld: Thesis, Utrecht (1966); Philips Research Reports Supplements 1967, No. 2

  34. A.L. Southern, W.R. Willis, M.T. Robinson: J. Appl. Phys.34, 153 (1963)

    Article  Google Scholar 

  35. D.E. Harrison, Jr., N.S. Levy, J.P. Johnson, H.M. Effron: J. Appl. Phys.39, 3742 (1968)

    Article  ADS  Google Scholar 

  36. T. Okutani, M. Shikata, S. Ichimura, R. Shimizu: J. Appl. Phys.51, 2884 (1980)

    Article  ADS  Google Scholar 

  37. P. Sigmund:Sputtering by Particle Bombardment I, ed. by R. Behrisch (Springer, Berlin 1981) p. 9–71

    Google Scholar 

  38. W. Eckstein: Nucl. Instr. Meth. B18, 344 (1987)

    Article  Google Scholar 

  39. J.F. Ziegler, J.P. Biersack, U. Littmark:The Stopping and Range of Ions in Solids (Pergamon, New York 1985)

    Google Scholar 

  40. D.J. O'Connor, J.P. Biersack:Nucl. Instr. Meth. B 15, 14 (1986)

    Article  ADS  Google Scholar 

  41. A. Oliva, R. Kelly, G. Falcone: Nucl. Instr. Meth. B19/20, 101 (1987)

    Article  Google Scholar 

  42. M.L. Roush, F. Davarya, G.P. Chambers, T.D. Andreadis, J. He, O.F. Goktepe, J. Fine: Nucl. Instr. Meth. B2, 693 (1984)

    Article  ADS  Google Scholar 

  43. R. Kelly, A. Oliva: Nucl. Instr. Meth. B13, 283 (1986)

    Article  ADS  Google Scholar 

  44. G. Falcone: Phys. Rev.33, 5054 (1986)

    Article  ADS  Google Scholar 

  45. M.W. Thompson: Philos. Mag.18, 377 (1968)

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Reactor Laboratory, Technical Research Centre of Finland, Otakaari 3 A, SF-02150, Espoo, Finland

    J. Likonen

  2. Department of Physics, University of Helsinki, Siltavuorenpenger 20 D, SF-00170, Helsinki, Finland

    M. Hautala

Authors
  1. J. Likonen
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Hautala
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Likonen, J., Hautala, M. Sputtering of Cu atoms by Ar ions. Appl. Phys. A 45, 137–150 (1988). https://doi.org/10.1007/BF02565201

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF02565201

Keywords

Search

Navigation