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Electron channelling patterns in scanning electron microscopy

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Abstract

This review outlines progress in the development of SEM electron channelling pattern techniques since Coates first observed patterns and Bookeret al. explained their origin ten years ago. Discussions are included on the mechanism of electron channelling in crystals, electron optical and specimen conditions for generating patterns, pattern indexing, selected-area analysis, and applications. Progress in revealing crystal defects is also discussed.

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  1. Materials Science Branch, Atomic Energy of Canada Limited, Chalk River Nuclear Laboratories, Chalk River, Ontario, Canada

    E. M. Schulson

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Schulson, E.M. Electron channelling patterns in scanning electron microscopy. J Mater Sci 12, 1071–1087 (1977). https://doi.org/10.1007/BF02426843

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  • DOI: https://doi.org/10.1007/BF02426843

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