Abstract
For samples prepared by ion implantation the dependence of the quality of the sample on parameters as implantation temperature, implantation dose and enthalpy of solution of the impurity-host system is discussed. Results from nuclear orientation experiments with the systems BiFe, CsFe and BrFe are presented and compared with recent channeling results and present information on the implantation process from computer simulations.
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Dämmrich, U., Herzog, P. Implantation temperature, dose and sample quality effects in nuclear orientation experiments. Hyperfine Interact 43, 167–186 (1988). https://doi.org/10.1007/BF02398298
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DOI: https://doi.org/10.1007/BF02398298